Patents by Inventor Marcus Ramstein

Marcus Ramstein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for repairing a photolithographic mask, and a photolithographic mask
    Patent number: 7157190
    Abstract: A method for repairing at least one defect of a light-influencing structure on a photolithographic mask with a mask substrate, in particular a quartz substrate, characterized in that in the region of at least one defect, gallium ions are radiated in a targeted manner for the purpose of implantation into the mask substrate and/or for the purpose of sputtering away material from the mask substrate. Furthermore, the invention relates to a photolithographic mask with a defect repaired in this way. As a result, defects in a light-influencing structure of a mask can be reliably repaired, and are repaired, respectively.
    Type: Grant
    Filed: November 6, 2003
    Date of Patent: January 2, 2007
    Assignee: Infineon Technologies AG
    Inventor: Marcus Ramstein
  • Method for repairing a photolithographic mask, and a photolithographic mask
    Publication number: 20040146787
    Abstract: A method for repairing at least one defect of a light-influencing structure on a photolithographic mask with a mask substrate, in particular a quartz substrate, characterized in that in the region of at least one defect, gallium ions are radiated in a targeted manner for the purpose of implantation into the mask substrate and/or for the purpose of sputtering away material from the mask substrate. Furthermore, the invention relates to a photolithographic mask with a defect repaired in this way. As a result, defects in a light-influencing structure of a mask can be reliably repaired, and are repaired, respectively.
    Type: Application
    Filed: November 6, 2003
    Publication date: July 29, 2004
    Applicant: Infineon Technologies AG
    Inventor: Marcus Ramstein