Publication number: 20260234787
Abstract: An evaporation source contains a target material containing one or more borides selected from the group of TiB2, W2B5, TaB2, VB2, NbB2, CrB2, MoB and HfB2 and one or more silicon-containing compounds selected from the group of TiSi2, Ti5Si3, CrSi2, Cr5Si3, Cr3Si, CeSi2, SiB6, HfSi, Hf5Si4, Hf3Si2, NbSi2, Nb5Si3, MoSi2, Mo5Si3, Mo3Si, ZrSi, Zr2Si, Zr5Si3, Zr5Si4, Zr3Si2, TaSi2, Ta5Si3, Ta3Si, Ta2Si, W5Si3 and WSi2, in addition to unavoidable impurities. The content of the silicon in the target material amounts to 1-30 at %. A method for produces an evaporation source of this kind.
Type:
Application
Filed:
January 15, 2024
Publication date:
August 13, 2026
Inventors:
Szilard KOLOZSVARI, Peter POLCIK, Marcus WOLFF