Patents by Inventor Marek Braun

Marek Braun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of implanting ion species into microstructure products by concurrently cleaning the implanter
    Patent number: 7816656
    Abstract: By operating an implantation tool with a source gas having a halogen fraction of 66 atomic percent or less relative to the total composition of the source gas, an in situ cleaning effect may be achieved while performing an implantation process.
    Type: Grant
    Filed: October 22, 2008
    Date of Patent: October 19, 2010
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Christian Krueger, Rastislav Kocis, Marek Braun, Niels-Wieland Hauptmann, Heinz Seidel
  • METHOD OF IMPLANTING ION SPECIES INTO MICROSTRUCTURE PRODUCTS BY CONCURRENTLY CLEANING THE IMPLANTER
    Publication number: 20090221136
    Abstract: By operating an implantation tool with a source gas having a halogen fraction of 66 atomic percent or less relative to the total composition of the source gas, an in situ cleaning effect may be achieved while performing an implantation process.
    Type: Application
    Filed: October 22, 2008
    Publication date: September 3, 2009
    Inventors: Christian Krueger, Rastislav Kocis, Marek Braun, Niels-Wieland Hauptmann, Heinz Seidel