Abstract: A sensor device, method of fabricating the same, and a method of sensing a physical quantity. The sensor device comprises a substrate; a flexure member, one end of the flexure member being attached to the substrate, and a free end of the flexure member having an edge surface; a counter surface formed on the substrate such that the counter surface faces the edge surface of the flexure member and such that a separation distance between the counter surface and the edge surface remains substantially constant for movement of the edge surface as a result of flexure of the flexure member, each of the edge surface and the counter surface including one or more conductor layers disposed in a plane substantially perpendicular to a flexure direction of the flexure member; and means for applying an electrical potential difference between the conductors of the edge surface and the conductors of the counter surface for detecting a quantum tunnelling current therebetween.

Abstract: A monolithic micro or nano electromechanical transducer device includes a pair of substrates (20, 25) respectively mounting one or more elongate electrical conductors (40) and resilient solid state hinge means (30, 32) integral with and linking the substrates to relatively locate the substrates so that respective elongate electrical conductors (40) of the substrates are opposed at a spacing that permits a detectable quantum tunnelling current between the conductors when a suitable electrical potential difference is applied across the conductors. The solid state hinge means permits relative parallel translation of the substrates transverse to the elongate electrical conductors.

Abstract: A sensor device, method of fabricating the same, and a method of sensing a physical quantity. The sensor device comprises a substrate; a flexure member, one end of the flexure member being attached to the substrate, and a free end of the flexure member having an edge surface; a counter surface formed on the substrate such that the counter surface faces the edge surface of the flexure member and such that a separation distance between the counter surface and the edge surface remains substantially constant for movement of the edge surface as a result of flexure of the flexure member, each of the edge surface and the counter surface including one or more conductor layers disposed in a plane substantially perpendicular to a flexure direction of the flexure member; and means for applying an electrical potential difference between the conductors of the edge surface and the conductors of the counter surface for detecting a quantum tunnelling current therebetween.

Abstract: An apparatus for manipulating or modifying electromagnetic waves or electromagnetic waves or a beam of particles, eg atoms, ions, molecules or charged particles, the apparatus comprising a micro or nano electrical conductor crossbar network having multiple cross-over junctions that define respective scattering points for electromagnetic waves or the particles of the beam. At least one structural parameter of the crossbar network is selectively tuneable to obtain a desired manipulation or modification of said wave or beam when incident on the network in a pre-determined directional electrical conductor crossbar network (10) configured as an atomic beam diffraction grating. The direction of wave propagation of the atomic beam is indicated by the arrow (15).

Abstract: A monolithic micro or nano electromechanical transducer device includes a pair of substrates (20, 25) respectively mounting one or more elongate electrical conductors (40) and resilient solid state hinge means (30, 32) integral with and linking the substrates to relatively locate the substrates so that respective elongate electrical conductors (40) of the substrates are opposed at a spacing that permits a detectable quantum tunnelling current between the conductors when a suitable electrical potential difference is applied across the conductors. The solid state hinge means permits relative parallel translation of the substrates transverse to the elongate electrical conductors.