Abstract: The present disclosure is a conveyor device which feeds a thin workpiece from an unwinding roll and conveys the thin workpiece on a conveyance path. The conveyor device includes first movable holding members, fixed holding members, a cutting device, second movable holding members, a first position sensor, and a first correction mechanism.

Abstract: A belt-form body conveyor that conveys a belt-form body includes a plurality of non-contact guide portions over which portions of the belt-form body are wound, and that support the belt-form body in a non-contact manner, a drive unit that moves at least one non-contact guide portion out of the plurality of non-contact guide portions, and a control unit that causes the non-contact guide portion to be moved by the drive unit such that a length of a path in which a first edge in a width direction of the belt-form body travels is different from a length of a path in which a second edge which is opposite to the first edge in the width direction of the belt-form body travels.

Abstract: A belt-form body conveyor that conveys a belt-form body includes a plurality of non-contact guide portions over which portions of the belt-form body are wound, and that support the belt-form body in a non-contact manner, and a drive unit that, when viewed in a direction that is perpendicular to a surface of the belt-form body before the belt-form body is supplied to the plurality of non-contact guide portions, causes at least two non-contact guide portions out of the plurality of non-contact guide portions to rotate in the same direction and by the same angle.

Abstract: The present disclosure is a conveyor device which feeds a thin workpiece from an unwinding roll and conveys the thin workpiece on a conveyance path. The conveyor device includes first movable holding members, fixed holding members, a cutting device, second movable holding members, a first position sensor, and a first correction mechanism.

Abstract: The present disclosure is a conveyor device which feeds a thin workpiece from an unwinding roll and conveys the thin workpiece on a conveyance path. The conveyor device includes first movable holding members, fixed holding members, a cutting device, second movable holding members, a first position sensor, and a first correction mechanism.

Abstract: A belt-form body conveyor that conveys a belt-form body includes a plurality of non-contact guide portions over which portions of the belt-form body are wound, and that support the belt-form body in a non-contact manner, and a drive unit that, when viewed in a direction that is perpendicular to a surface of the belt-form body before the belt-form body is supplied to the plurality of non-contact guide portions, causes at least two non-contact guide portions out of the plurality of non-contact guide portions to rotate in the same direction and by the same angle.

Abstract: A belt-form body conveyor that conveys a belt-form body includes a plurality of non-contact guide portions over which portions of the belt-form body are wound, and that support the belt-form body in a non-contact manner, a drive unit that moves at least one non-contact guide portion out of the plurality of non-contact guide portions, and a control unit that causes the non-contact guide portion to be moved by the drive unit such that a length of a path in which a first edge in a width direction of the belt-form body travels is different from a length of a path in which a second edge which is opposite to the first edge in the width direction of the belt-form body travels.

Abstract: The present disclosure is a tension control device which includes a pressing member configured to press an object in a noncontact manner by spraying a gas onto the object to which tension is applied, an actuator configured to vary a position of the pressing member, a pressure sensor configured to detect pressure of the gas, a gap sensor configured to detect a floating amount of the object from the pressing member, and a control unit configured to control the actuator based on a detected value of the pressure sensor and a detected value of the gap sensor.

Abstract: The present disclosure is a tension control device which includes a pressing member configured to press an object in a noncontact manner by spraying a gas onto the object to which tension is applied, an actuator configured to vary a position of the pressing member, a pressure sensor configured to detect pressure of the gas, a gap sensor configured to detect a floating amount of the object from the pressing member, and a control unit configured to control the actuator based on a detected value of the pressure sensor and a detected value of the gap sensor.

Abstract: The present disclosure is a conveyor device which feeds a thin workpiece from an unwinding roll and conveys the thin workpiece on a conveyance path. The conveyor device includes first movable holding members, fixed holding members, a cutting device, second movable holding members, a first position sensor, and a first correction mechanism.

Abstract: A substrate storage facility comprises a multilevel shelf, on which a plurality of cassettes with airtight covers accommodating a plurality of substrates can be placed; a substrate transport portion, moveably positioned on the front-face side of the multilevel shelf, which opens and closes the airtight covers of the cassettes with airtight covers placed on the multilevel shelf, and which transports the substrates between cassettes with airtight covers; and, a cassette transport portion, moveably positioned on the rear-face side of the multilevel shelf, which carries cassettes with airtight covers into and out of all the cassette placement positions of the multilevel shelf. By means of this substrate storage facility, interchange processing of substrates accommodated in cassettes, as well as carrying in and out of cassettes when appropriate, can be performed.

Abstract: The wafer storing cabinet has a storing cabinet main body 10 which is provided therein with storage cassettes 11, accommodation shelves 12A and 12B, and a wafer transfer section 20, and has an in/out storing cabinet 17, inert gas is supplied into the storing cabinet main body 10, in the wafer transfer section 20, wafers taken out from the transfer cassettes 15 and 16 which are transferred into the storing cabinet main body 10 are accommodated in the storage cassette 11, wafer taken out from the storage cassette 11 are accommodated in the transfer cassettes 15 and 16, the storage cassette 11 has a door which can secure a hermetic function, and the door is always closed except when a wafer is transferred into the storage cassette 11 and when a wafer is transferred out from the storage cassette 11.