Patents by Inventor Margaret A. Lawson

Margaret A. Lawson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20080038676
    Abstract: A top coat material for applying on top of a photoresist material is disclosed. The top coat material includes a polymer, which includes at least one fluorosulfonamide monomer unit having one of the following two structures: wherein: M is a polymerizable backbone moiety; Z is a linking moiety selected from the group consisting of —C(O)O—, —C(O)—, —OC(O)—, and —O—C(O)—C(O)—O—; R1 is selected from the group consisting of an alkylene, an arylene, a semi- or perfluorinated alkylene, and a semi- or perfluorinated arylene; p and q are 0 or 1; R2 is selected from the group consisting of hydrogen, fluorine, an alkyl group of 1 to 6 carbons, and a semi- or perfluorinated alkyl group of 1 to 6 carbons; n is an integer from 1 to 6; and R3 is selected from the group consisting of hydrogen, an alkyl, an aryl, a semi- or perfluorinated alkyl, and a semi- or perfluorinated aryl. The top coat material may be used in lithography processes, wherein the top coat material is applied on a photoresist layer.
    Type: Application
    Filed: October 19, 2007
    Publication date: February 14, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Wenjie Li, Margaret Lawson, Pushkara Varanasi
  • Publication number: 20070243484
    Abstract: The present invention discloses an antireflective coating composition for applying between a substrate surface and a positive photoresist composition. The antireflective coating composition is developable in an aqueous alkaline developer. The antireflective coating composition comprises a polymer, which comprises at least one monomer unit containing one or more moieties selected from the group consisting of a lactone, maleimide, and an N-alkyl maleimide; and at least one monomer unit containing one or more absorbing moieties. The polymer does not comprise an acid labile group. The present invention also discloses a method of forming and transferring a relief image by using the inventive antireflective coating composition in photolithography.
    Type: Application
    Filed: April 18, 2006
    Publication date: October 18, 2007
    Inventors: Kuang-Jung Chen, Mahmoud Khojasteh, Ranee Kwong, Margaret Lawson, Wenjie Li, Kaushal Patel, Pushkara Varanasi
  • Publication number: 20050266354
    Abstract: A top coat material for applying on top of a photoresist material is disclosed. The top coat material includes a polymer, which includes at least one fluorosulfonamide monomer unit having one of the following two structures: wherein: M is a polymerizable backbone moiety; Z is a linking moiety selected from the group consisting of —C(O)O—, —C(O)—, —OC(O)—, and —O—C(O)—C(O)—O—; R1 is selected from the group consisting of an alkylene, an arylene, a semi- or perfluorinated alkylene, and a semi- or perfluorinated arylene; p and q are 0 or 1; R2 is selected from the group consisting of hydrogen, fluorine, an alkyl group of 1 to 6 carbons, and a semi- or perfluorinated alkyl group of 1 to 6 carbons; n is an integer from 1 to 6; and R3 is selected from the group consisting of hydrogen, an alkyl, an aryl, a semi- or perfluorinated alkyl, and a semi- or perfluorinated aryl. The top coat material may be used in lithography processes, wherein the top coat material is applied on a photoresist layer.
    Type: Application
    Filed: May 27, 2004
    Publication date: December 1, 2005
    Inventors: Wenjie Li, Margaret Lawson, Pushkara Varanasi
  • Publication number: 20050019704
    Abstract: Compositions suitable for forming planarizing underlayers for multilayer lithographic processes are characterized by the presence of (A) a polymer containing: (i) cyclic ether moieties, (ii) saturated polycyclic moieties, and (iii) aromatic moieties for compositions not requiring a separate crosslinker, or (B) a polymer containing: (i) saturated polycyclic moieties, and (ii) aromatic moieties for compositions requiring a separate crosslinker. The compositions provide outstanding optical, mechanical and etch selectivity properties. The compositions are especially useful in lithographic processes using radiation less than 200 nm in wavelength to configure underlying material layers.
    Type: Application
    Filed: August 18, 2004
    Publication date: January 27, 2005
    Inventors: Mahmoud Khojasteh, Timothy Hughes, Ranee Kwong, Pushkara Varanasi, William Brunsvold, Margaret Lawson, Robert Allen, David Medeiros, Ratnam Sooriyakumaran, Phillip Brock
  • Patent number: 5196220
    Abstract: A fermented malt beverage having improved foam stability and desirable lace, cling, and clarity is described. The beverage is stabilized by adding 5-400 ppm by weight of combined gellan gum and a cold-water soluble protein.
    Type: Grant
    Filed: May 23, 1990
    Date of Patent: March 23, 1993
    Assignee: Merck & Co., Inc.
    Inventors: Kenneth Clare, deceased, Margaret A. Lawson
  • Patent number: 5190778
    Abstract: A fermented malt beverage having improved foam stability and desirable lace, cling, and clarity is described. The beverage is stabilized by adding 5-400 ppm by weight of gellan gum.
    Type: Grant
    Filed: May 23, 1990
    Date of Patent: March 2, 1993
    Assignee: Merck & Co., Inc.
    Inventors: Kenneth Clare, deceased, Margaret A. Lawson
  • Patent number: 4729900
    Abstract: A fermented malt beverage having improved foam stability and desirable lace, cling, and clarity is described. The beverage is stabilized by adding 5-400 ppm by weight of combined xanthan gum and a cold-water soluble protein.
    Type: Grant
    Filed: April 22, 1986
    Date of Patent: March 8, 1988
    Assignee: Merck & Co., Inc.
    Inventors: Kenneth Clare, Margaret A. Lawson, Walter Bryden
  • Patent number: 4720389
    Abstract: A fermented malt beverage having improved foam stability and desirable lace, cling, and clarity is described. The beverage is stabilized by adding 5-400 ppm by weight of combined xanthan gum and a galactomannan, e.g., guar gum or locust bean gum, or the glucomannan konjak gum.
    Type: Grant
    Filed: April 22, 1986
    Date of Patent: January 19, 1988
    Assignee: Merck & Co., Inc.
    Inventors: Kenneth Clare, Margaret A. Lawson
  • Patent number: D758684
    Type: Grant
    Filed: October 22, 2014
    Date of Patent: June 7, 2016
    Inventors: Michael C. Lawson, Margaret Lawson