Abstract: The present invention provides an ozone processing monitor and a method of using the same in ozone processing to determine whether sufficient ozone treatment has occurred on a production part needing ozone treatment. The ozone processing monitor of the present invention comprises an ozone sensitive material which is capable of thinning, bleaching, forming an oxide layer or undergoing any other physical or chemical change upon exposure to ozone, wherein said physical or chemical change produces a visible color change of said ozone sensitive material which can be monitored during or following ozone processing. The color change of the ozone sensitive material can be compared to standards to determine if too little, too much or appropriate ozone treatment has occurred.