Patents by Inventor Margreet Obertine Anne-Marie Van Wijck

Margreet Obertine Anne-Marie Van Wijck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vertical oven with a boat for the uniform treatment of wafers
    Publication number: 20010047761
    Abstract: Method for the treatment of semiconductor substrates as well as an oven-boat system for this purpose. The oven is embodied as a vertical oven and it is aimed to simultaneously treat a number of substrates arranged one above the other in a boat. To carry out the deposition and such processes at raised temperatures as uniformly as possible, that is, so that each semiconductor substrate substantially undergoes the same treatment, it is proposed on the one hand to vary the ratio of the volume limited by two consecutive armrests and on the other hand the volume limited by screening off the process area and the edge of the substrates from the insertion end of the gas to the discharge end of the gas that flows through the oven.
    Type: Application
    Filed: May 7, 2001
    Publication date: December 6, 2001
    Inventors: Margreet Obertine Anne-Marie Van Wijck, Rudi Wilhelm, Ernst Hendrik August Granneman
  • Vertical oven with a boat for the uniform treatment of wafers
    Patent number: 6240875
    Abstract: Method for the treatment of semiconductor substrates as well as an oven-boat system for this purpose. The oven is embodied as a vertical oven and it is aimed to simultaneously treat a number of substrates arranged one above the other in a boat. To carry out the deposition and such processes at raised temperatures an uniformly as possible, that is, so that each semiconductor substrate substantially undergoes the same treatment, it is proposed on the one hand to vary the ratio of the volume limited by two consecutive armrests and on the other hand the volume limited by screening off the process area and the edge of the substrates from the insertion end of the gas to the discharge end of the gas that flows through the oven.
    Type: Grant
    Filed: July 7, 1999
    Date of Patent: June 5, 2001
    Assignee: ASM International N.V.
    Inventors: Margreet Obertine Anne-Marie Van Wijck, Rudi Wilhelm, Ernst Hendrik August Granneman