Patents by Inventor Maria Ganchenkova

Maria Ganchenkova has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Micromechanical devices comprising n-type doping agents
    Patent number: 9559660
    Abstract: The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element made of semiconductor material comprising n-type doping agent and excitation or sensing means functionally connected to said oscillating or deflecting element. According to the invention, the oscillating or deflecting element is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.
    Type: Grant
    Filed: February 17, 2012
    Date of Patent: January 31, 2017
    Assignee: Teknologian tutkimuskeskus VTT Oy
    Inventors: Tuomas Pensala, Antti Jaakkola, Maria Ganchenkova, Mika Prunnila, Jyrki Kiihamaki
  • Novel micromechanical devices
    Publication number: 20140077898
    Abstract: The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element made of semiconductor material comprising n-type doping agent and excitation or sensing means functionally connected to said oscillating or deflecting element. According to the invention, the oscillating or deflecting element is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.
    Type: Application
    Filed: February 17, 2012
    Publication date: March 20, 2014
    Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT
    Inventors: Tuomas Pensala, Antti Jaakkola, Maria Ganchenkova, Mika Prunnila, Jyrki Kiihamaki