Patents by Inventor Marie Angelopolus

Marie Angelopolus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Line width control in a radiation sensitive polyimide
    Patent number: 5300403
    Abstract: Standard processing techniques for creating a patterned polyimide film from a radiation sensitive polyimide film forming composition are modified to include a post-develop, flood exposure/hardening step which crosslinks precursors of the polyimide film prior to curing. The flood exposure/hardening step prevents pull-back of the wall profile which occurs during the shrinkage of radiation sensitive polyimide film forming composition which occurs during thermal curing.
    Type: Grant
    Filed: June 18, 1992
    Date of Patent: April 5, 1994
    Assignee: International Business Machines Corporation
    Inventors: Marie Angelopolus, Daniel G. Berger, Eric D. Perfecto, Peter J. Wilkens