Patents by Inventor Marie J. Welsch

Marie J. Welsch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion beam implant current, spot width and position tuning
    Patent number: 7442944
    Abstract: An ion beam tuning method, system and program product for tuning an ion implanter system are disclosed. The invention obtains an ion beam profile of the ion beam by, for example, scanning the ion beam across a profiler that is within an implant chamber; and tunes the ion implanter system to maximize an estimated implant current based on the ion beam profile to simultaneously optimize total ion beam current and ion beam spot width, and maximize implant current. In addition, the tuning can also position the ion beam along a desired ion beam path based on the feedback of the spot beam center, which improves ion implanter system productivity and performance by reducing ion beam setup time and provides repeatable beam angle performance for each ion beam over many setups.
    Type: Grant
    Filed: October 7, 2004
    Date of Patent: October 28, 2008
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Shengwu Chang, Antonella Cucchetti, Joseph P. Dzengeleski, Gregory R. Gibilaro, Rosario Mollica, Gregg A. Norris, Joseph C. Olson, Marie J. Welsch