Patents by Inventor Marie-Therese Delaye

Marie-Therese Delaye has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070122929
    Abstract: The invention concerns a sealing zone between two microstructure substrates. Said sealing zone comprises at least the following parts: on a first wafer level (20), a lower edging (22A) made of an adhesive material capable of causing the first substrate (20) to adhere to a sealing material, said sealing material being adapted to spontaneously diffuse jointly with the material of the second wafer level (30); on said lower edging (22A), a layer of said sealing material; and on said layer of sealing material, a protuberance (36) formed on said second wafer level (30) containing a certain amount of sealing material. The invention is applicable to microstructures comprising vacuum-operated components.
    Type: Application
    Filed: December 17, 2002
    Publication date: May 31, 2007
    Inventors: Bernard Diem, Stephane Caplet, Marie-Therese Delaye
  • Publication number: 20020088646
    Abstract: Structure equipped with electrical contacts formed through the substrate of this structure and the process for obtaining such a structure.
    Type: Application
    Filed: March 13, 2002
    Publication date: July 11, 2002
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE
    Inventors: Stephane Caplet, Marie-Therese Delaye
  • Publication number: 20010009112
    Abstract: Pressure sensor cell comprising:
    Type: Application
    Filed: March 22, 2001
    Publication date: July 26, 2001
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE
    Inventor: Marie-Therese Delaye
  • Patent number: 5912499
    Abstract: An integrated pressure sensitive transducer incorporating a pressure sensitive structure having a silicon substrate, and at least one monocrystalline silicon diaphragm deformable in a direction perpendicular to the substrate. The diaphragm, which is joined to the substrate at its periphery by means of an etched insulating layer, has a centered insulating stud which bears on the substrate in order to increase the rigidity of the diaphragm. Completing the transducer and for measuring the deformation of the diaphragm is at least one first electrode located in the substrate facing a high deformation region of the diaphragm and remote from the periphery of the diaphragm and the insulating stud, and at least one second electrode facing at least one low deformation region of the diaphragm and in the vicinity of the periphery and/or the insulating stud.
    Type: Grant
    Filed: December 22, 1995
    Date of Patent: June 15, 1999
    Assignee: Commissariat A L'Energie Atomique
    Inventors: Bernard Diem, Marie-Therese Delaye
  • Patent number: 5781994
    Abstract: A process for the micromechanical fabrication of nozzles for ink jets includes forming a groove on a surface of a first substrate, securing the first substrate to a second substrate to form an assembly in which the second substrate covers the groove to form a channel having walls, and then forming an internal protective coating within the channel by thermal oxidation of the walls of the channel. The first and second substrates are then cut along a plane extending perpendicular to the channel thereby to form a nozzle for dispensing a liquid jet. Scales, formed as a result of the cutting operations, are formed on the internal protective coating rather than directly on the walls of the channel. These scales then are removed from the nozzle by eliminating the internal protective coating.
    Type: Grant
    Filed: November 29, 1995
    Date of Patent: July 21, 1998
    Assignee: Commissariate a l'Energie Atomique
    Inventors: Yves Fouillet, Gilles Delapierre, Marie-Therese Delaye
  • Patent number: 5780885
    Abstract: Process for the production of accelerometers using the silicon on insulator method. The process comprises the following stages: a) producing a conductive monocrystalline silicon film on a silicon substrate and separated from the latter by an insulating layer; b) etching the silicon film and the insulating layer up to the substrate in order to fix the shape of the mobile elements and the measuring device; c) producing electric contacts for the measuring devices; d) partial elimination of the insulating layer in order to free the mobile elements, the remainder of the insulating layer rendering integral the substrate and the moving elements.
    Type: Grant
    Filed: August 15, 1996
    Date of Patent: July 14, 1998
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Bernard Diem, Marie-Therese Delaye
  • Patent number: 5576250
    Abstract: A process for the production of accelerometers using the silicon on insulator method. The process comprises the following stages: a) producing a conductive monocrystalline silicon film on a silicon substrate and separated from the latter by an insulating layer; b) etching the silicon film and the insulating layer up to the substrate in order to fix the shape of the mobile elements and the measuring devices; c) producing electric contacts for the measuring devices; d) partial elimination of the insulating layer in order to free the mobile elements, the remainder of the insulating layer rendering integral the substrate and the moving elements.
    Type: Grant
    Filed: December 27, 1993
    Date of Patent: November 19, 1996
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Bernard Diem, Marie-Therese Delaye
  • Patent number: 5510276
    Abstract: A process for producing a pressure transducer or sensor using the silicon-on-insulator method is provided. The process includes the following steps: (a) producing a monocrystalline silicon film (44) on a silicon substrate (6) at least locally separated from the latter by an insulating layer (42), (b) producing an opening (24) in the silicon film down to the insulating layer, (c) partially eliminating the insulating layer via the opening in order to form the diaphragm in the silicon film, and (d) resealing the opening (26).
    Type: Grant
    Filed: December 15, 1993
    Date of Patent: April 23, 1996
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Bernard Diem, Marie-Therese Delaye
  • Patent number: 4912673
    Abstract: Magnetic bubble memory in hybrid technology using rows of chevron patterns. The memory detection system has an active detection zone (4) constituted by rows of chevrons, in order to stretch into the form of a strip the bubbles from a propagation path (2), and a first detector (8); a bubble elimination zone (12) constituted by forcing back means (18) for stopping the advance of the bubbles and for forcing them outside the detection system; and a passive detection zone (6) located following the bubble elimination zone (12) and incorporating a second detector (9), to which no bubble must be exposed, in order to eliminate the unwanted signal due to the influence of a rotary magnetic field necessary for the propagation of the bubbles. According to the invention, elimination zone (12) is provided with at least one barrier (20) produced by ion implantation in order to block the passage of the bubbles from active zone (4) to passive zone (6).
    Type: Grant
    Filed: December 30, 1988
    Date of Patent: March 27, 1990
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Jean-Marc Fedeli, Joel Magnin, Marie-Therese Delaye, Marc Rabarot
  • Patent number: 4773054
    Abstract: A bubble memory with a hybrid junction formed between a first propagation track defined by a boundary between an implanted area and a non-implanted area and a second propagation track defined by a sequence of deposited patterns. The overlap zone between the tracks has a surface substantially equal in size to the magnetic bubble. The boundary cleared by the magnetic bubble has a direction perpendicular to an easy magnetization axis of the magnetic material of the memory, and an implanted area is formed beneath one leg of the deposited pattern.
    Type: Grant
    Filed: January 29, 1987
    Date of Patent: September 20, 1988
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Marie-Therese Delaye, Jean-Marc Fedeli, Joel Magnin, Marc Rabarot