Patents by Inventor Marin Sigurdson
Marin Sigurdson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11955504Abstract: Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a substrate having contacts and a surface. The surface defines a plane. The infrared imaging device further includes a microbolometer array coupled to the substrate. Each microbolometer of the microbolometer array includes a cross-section having a first section, a second section substantially parallel to the first section, and a third section joining the first section and the second section.Type: GrantFiled: September 10, 2021Date of Patent: April 9, 2024Assignee: Teledyne FLIR Commercial Systems, Inc.Inventors: Eric A. Kurth, Marin Sigurdson, Robert F. Cannata
-
Patent number: 11824078Abstract: Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a substrate having contacts and a surface. The surface defines a plane. The infrared imaging device further includes a microbolometer array coupled to the substrate. Each microbolometer of the microbolometer array includes a second having a first dimension that extends in a first direction substantially parallel to the plane and a second dimension that extends in a second direction away from the plane. The first dimension is less than the second dimension. The segment includes a metal layer and a layer formed on a side of the metal layer.Type: GrantFiled: June 7, 2021Date of Patent: November 21, 2023Assignee: Teledyne FLIR, LLCInventors: Eric A. Kurth, Marin Sigurdson, Robert F. Cannata, James L. Dale, Christopher Chan
-
Patent number: 11594389Abstract: Systems and methods for forming a magnetostatic MEMS switch include forming a movable beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A shunt bar on the movable plate may close the switch when lowered onto the contacts. The switch may generally be closed, with the shunt bar resting on the contacts. However, a magnetically permeable material may also be inlaid into the movable plate. The switch may then be opened by placing either a permanent magnet or an electromagnet in proximity to the switch.Type: GrantFiled: March 15, 2021Date of Patent: February 28, 2023Assignee: Innovative Micro TechnologyInventors: Christopher S Gudeman, Marin Sigurdson
-
Publication number: 20220228811Abstract: Titanium-based thermal ground planes are described.Type: ApplicationFiled: November 26, 2012Publication date: July 21, 2022Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventors: Payam Bozorgi, Carl D. Meinhart, Marin Sigurdson, Noel C. MacDonald, David Bothman, Yu-Wei Liu
-
Publication number: 20210404881Abstract: Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a microbolometer array. The microbolometer array includes a plurality of microbolometers. Each microbolometer includes a microbolometer bridge that includes a first portion and a second portion. The first portion includes a resistive layer configured to capture infrared radiation. The second portion includes a second portion having a plurality of perforations defined therein.Type: ApplicationFiled: September 10, 2021Publication date: December 30, 2021Inventors: Eric A. Kurth, Marin Sigurdson, Robert F. Cannata
-
Publication number: 20210404878Abstract: Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a substrate having contacts and a surface. The surface defines a plane. The infrared imaging device further includes a microbolometer array coupled to the substrate. Each microbolometer of the microbolometer array includes a cross-section having a first section, a second section substantially parallel to the first section, and a third section joining the first section and the second section.Type: ApplicationFiled: September 10, 2021Publication date: December 30, 2021Inventors: Eric A. Kurth, Marin Sigurdson, Robert F. Cannata
-
Publication number: 20210293627Abstract: Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a substrate having contacts and a surface. The surface defines a plane. The infrared imaging device further includes a microbolometer array coupled to the substrate. Each microbolometer of the microbolometer array includes a second having a first dimension that extends in a first direction substantially parallel to the plane and a second dimension that extends in a second direction away from the plane. The first dimension is less than the second dimension. The segment includes a metal layer and a layer formed on a side of the metal layer.Type: ApplicationFiled: June 7, 2021Publication date: September 23, 2021Inventors: Eric A. Kurth, Marin Sigurdson, Robert F. Cannata, James L. Dale, Christopher Chan
-
Publication number: 20210202196Abstract: Systems and methods for forming a magnetostatic MEMS switch include forming a movable beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A shunt bar on the movable plate may close the switch when lowered onto the contacts. The switch may generally be closed, with the shunt bar resting on the contacts. However, a magnetically permeable material may also be inlaid into the movable plate. The switch may then be opened by placing either a permanent magnet or an electromagnet in proximity to the switch.Type: ApplicationFiled: March 15, 2021Publication date: July 1, 2021Applicant: Innovative Micro TechnologyInventors: Christopher S. GUDEMAN, Marin SIGURDSON
-
Publication number: 20190066937Abstract: Systems and methods for forming a magnetostatic MEMS switch include forming a movable beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A shunt bar on the movable plate may close the switch when lowered onto the contacts. The switch may generally be closed, with the shunt bar resting on the contacts. However, a magnetically permeable material may also be inlaid into the movable plate. The switch may then be opened by placing either a permanent magnet or an electromagnet in proximity to the switch.Type: ApplicationFiled: August 17, 2018Publication date: February 28, 2019Applicant: Innovative Micro TechnologyInventors: Christopher S. GUDEMAN, Marin SIGURDSON
-
Publication number: 20180155184Abstract: We describe here a method that employs through substrate vias (TSVs) to frustrate the standing waves that are formed in the metal trace. TSVs may be formed at intervals in the first substrate, electrically coupling the metal bondline to the ground plane.Type: ApplicationFiled: December 5, 2017Publication date: June 7, 2018Applicant: Innovative Micro TechnologyInventors: Christopher S. GUDEMAN, Marin SIGURDSON
-
Patent number: 9953787Abstract: Systems and methods for forming an electrostatic MEMS switch include forming a movable cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate. The cantilevered beam may be formed by etching the perimeter shape in the device layer of an SOI substrate. An additional void may be formed in the movable beam such that it bends about an additional hinge line as a result of the additional void. This may give the beam and switch advantageous kinematic characteristics.Type: GrantFiled: March 4, 2016Date of Patent: April 24, 2018Assignee: Innovative Micro TechnologyInventors: Christopher S. Gudeman, Paul J. Rubel, Marin Sigurdson
-
Publication number: 20180079640Abstract: Systems and methods for forming an electrostatic MEMS switch that is used to switch a source of current or voltage. At least one surface of the MEMS switch may be rotated on approach to another substrate, such that when the surfaces are separated, the forces are shearing forces rather than static frictional forces.Type: ApplicationFiled: September 11, 2017Publication date: March 22, 2018Applicant: Innovative Micro TechnologyInventors: Christopher S. GUDEMAN, Marin Sigurdson
-
Publication number: 20170146793Abstract: A microfabricated optical apparatus that includes a light source or light detector in combination with an integrated turning surface to form a microfabricated optical subassembly. The integrated turning surface may be formed directly in the substrate material using gray scale lithography.Type: ApplicationFiled: November 18, 2016Publication date: May 25, 2017Applicant: Innovative Micro TechnologyInventors: Christopher S. GUDEMAN, Sangwoo Kim, Stuart Hutchinson, Marin SIGURDSON
-
Publication number: 20160268084Abstract: Systems and methods for forming an electrostatic MEMS switch include forming a movable cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate. The cantilevered beam may be formed by etching the perimeter shape in the device layer of an SOI substrate. An additional void may be formed in the movable beam such that it bends about an additional hinge line as a result of the additional void. This may give the beam and switch advantageous kinematic characteristics.Type: ApplicationFiled: March 4, 2016Publication date: September 15, 2016Applicant: Innovative Micro TechnologyInventors: Christopher S. GUDEMAN, Paul J. RUBEL, Marin Sigurdson
-
Publication number: 20130327504Abstract: Titanium-based thermal ground planes are described.Type: ApplicationFiled: November 26, 2012Publication date: December 12, 2013Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventors: Payam Bozorgi, Carl D. Meinhart, Marin Sigurdson, Noel C. MacDonald, David Bothman, Yu-Wei Liu