Patents by Inventor Marina FUKAWA

Marina FUKAWA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SILICON OXIDE FILM, MATERIAL FOR GAS BARRIER FILM, AND METHOD FOR PRODUCING SILICON OXIDE FILM
    Publication number: 20220213129
    Abstract: To provide a silicon oxide film which exhibits high gas barrier performance even under a thin film condition. A silicon oxide film characterized by satisfying the following requirements (1) and (2): (1) the water vapor transmission rate (WVTR) at a film thickness of at most 500 nm is at most 9.0×10?3 g/m2·day, (2) the carbon concentration in the film, as measured by X-ray photoelectron spectroscopy (XPS), is at most 3.0 atom %.
    Type: Application
    Filed: April 3, 2020
    Publication date: July 7, 2022
    Inventors: Shun SUGIMOTO, Hirokazu CHIBA, Ryoji TANAKA, Marina FUKAWA