Abstract: Provided is a fluid actuator capable of safely driving a drive target. An air actuator using air as a working fluid includes an X-axis pressure sensor that measures air pressures PX+ and PX? along one drive axis, which drives a drive target in an X direction, a Y-axis pressure sensor that measures air pressures PY1+, PY1?, PY2+, and PY2? along two drive axes, which drive the drive target in a Y direction, and an acceleration detection unit that detects translational acceleration and rotational acceleration generated in the drive target on the basis of the measured air pressures PX+, PX?, PY1+, PY1?, PY2+, and PY2?.

Abstract: Provided is a fluid actuator capable of safely driving a drive target. An air actuator using air as a working fluid includes an X-axis pressure sensor that measures air pressures PX+ and PX? along one drive axis, which drives a drive target in an X direction, a Y-axis pressure sensor that measures air pressures PY1+, PY1?, PY2+, and PY2? along two drive axes, which drive the drive target in a Y direction, and an acceleration detection unit that detects translational acceleration and rotational acceleration generated in the drive target on the basis of the measured air pressures PX+, PX?, PY1+, PY1?, PY2+, and PY2?.

Abstract: There is provided a control device that controls a controlled variable of a control target to a target value by controlling a flow rate of gas supplied to and discharged from the control target by a spool type flow control valve. The control device includes a controller that generates a spool position command of the spool type flow control valve, based on the target value, and a non-linear compensator that applies a correction for linearly compensating for non-linear flow rate characteristics of the spool type flow control valve to the generated spool position command, and outputs the command to the spool type flow control valve.