Patents by Inventor Marinus van der Zande

Marinus van der Zande has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070125945
    Abstract: A lens of particle-optical apparatus, such as the objective lens, suffers from aberrations. As is already known since decades Ronchigrams can be used to determine these aberrations of particle-optical lenses. Such methods rely e.g. on the determination of the 2nd derivative of the aberration function on the basis of local magnification in one or a set of Ronchigrams. Being dependent on the 2nd derivative the mathematics of these methods allow only (infinitesimal) small shifts between the Ronchigrams. However, this implies that e.g. the spatial quantization noise of the camera recording the Ronchigrams results in a large error. These conflicting requirements limit the accuracy and thus the usefulness of the known methods. The invention describes a set of algorithms which result in an improved method to quantify the lens aberration coefficients using a set of Ronchigrams.
    Type: Application
    Filed: December 5, 2006
    Publication date: June 7, 2007
    Applicant: FEI Company
    Inventors: Marinus van der Zande, Christiaan Kok, Bernd Rieger