Abstract: The present invention describes a buried reflective electrode with vias and mesh current spreader isolated by a reflective stack of dielectric layers (BREVMIRS). The BREVMIRS includes a reflective stack of dielectric layers, a conducting mesh, a transparent conducting layer and a first electrode layer with vias going through the stack of reflective dielectric layers, the conducting mesh and the transparent conducting layer. There is at least one via going through the conductive reflective mesh and transparent conducting electrode. The BREVMIRS may be integrated into semiconductor light emitting diode devices to improve the device efficiency and light output power.