Patents by Inventor Marion Batz

Marion Batz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for examining a beam of charged particles
    Patent number: 11961705
    Abstract: The present invention relates to a method for examining a beam of charged particles, including the following steps: producing persistent interactions of the beam with a sample at a plurality of positions of the sample relative to the beam and deriving at least one property of the beam by analyzing the spatial distribution of the persistent interactions at the plurality of positions.
    Type: Grant
    Filed: December 22, 2020
    Date of Patent: April 16, 2024
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Daniel Rhinow, Markus Bauer, Rainer Fettig, David Lämmle, Marion Batz, Katharina Gries, Sebastian Vollmar, Petra Spies, Ottmar Hoinkis
  • METHOD AND APPARATUS FOR EXAMINING A BEAM OF CHARGED PARTICLES
    Publication number: 20210110996
    Abstract: The present invention relates to a method for examining a beam of charged particles, including the following steps: producing persistent interactions of the beam with a sample at a plurality of positions of the sample relative to the beam and deriving at least one property of the beam by analyzing the spatial distribution of the persistent interactions at the plurality of positions.
    Type: Application
    Filed: December 22, 2020
    Publication date: April 15, 2021
    Inventors: Daniel Rhinow, Markus Bauer, Rainer Fettig, David Lämmle, Marion Batz, Katharina Gries, Sebastian Vollmar, Petra Spies, Ottmar Hoinkis
  • Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope
    Patent number: 9336983
    Abstract: The invention refers to a scanning particle microscope comprising: (a) at least one reference object which is fixedly arranged at an output of the scanning particle microscope for a particle beam so that the reference object can at least partially be imaged by use of the electron beam; (b) at least one scanning unit operable to scan a particle beam of the scanning particle microscope across at least one portion of the reference object; and (c) at least one setting unit operable to change at least one setting of the scanning particle microscope.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: May 10, 2016
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Michael Budach, Christof Baur, Dajana Cujas, Robert Heberlein, Marion Batz