Patents by Inventor Mariste A. Thomson

Mariste A. Thomson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for control of photoresist develop processes
    Patent number: 5292605
    Abstract: A method for the control of photoresist develop processes employing multiple spray-puddle steps in which process changes other than time, such as endpoint are used to determine the length of the spray and puddle steps.
    Type: Grant
    Filed: October 7, 1992
    Date of Patent: March 8, 1994
    Assignee: Xinix, Inc.
    Inventor: Mariste A. Thomson
  • Method for control of photoresist develop processes
    Patent number: 5196285
    Abstract: A method for the control of photoresist develop processes employing multiple spray-puddle steps in which process changes other than time, such as endpoint are used to determine the length of the spray and puddle steps.
    Type: Grant
    Filed: May 18, 1990
    Date of Patent: March 23, 1993
    Assignee: Xinix, Inc.
    Inventor: Mariste A. Thomson
  • Method of endpoint detection and structure therefor
    Patent number: 5190614
    Abstract: Methods and apparatus for enhancing the accuracy for detecting the endpoint of certain operations (such as etching, photoresist development or chemical reaction) in the processing of materials which results in a change in the reflectivity or refractive index of the material are provided. The methods decrease the sensitivity of endpoint detection to high frequency noise and periodic oscillations. The methods also allow accurate calculation of overprocessing time and real-time viewing of data by the user.
    Type: Grant
    Filed: September 5, 1990
    Date of Patent: March 2, 1993
    Assignee: Luxtron Corporation
    Inventors: Steven C. Leach, Jewett W. Fowler, Herbert E. Litvak, Mariste A. Thomson