Patents by Inventor Marjorio Rafanan

Marjorio Rafanan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of making a MEMS device by monitoring a process parameter
    Patent number: 7569488
    Abstract: Embodiments of the present invention relate to methods and systems for making a microelectromechanical system MEMS device comprising supplying an etchant to etch one or more sacrificial structures of the system in a chamber. A process parameter relating to the pressure within the chamber is monitored as a function of time to provide an indication of the extent of the etching of the one or more sacrificial structures.
    Type: Grant
    Filed: June 22, 2007
    Date of Patent: August 4, 2009
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventor: Marjorio Rafanan
  • INDICATION OF THE END-POINT REACTION BETWEEN XeF2 AND MOLYBDENUM
    Publication number: 20080318344
    Abstract: Embodiments of the present invention relate to methods and systems for making a microelectromechanical system comprising supplying an etchant to etch one or more sacrificial structures of the system.
    Type: Application
    Filed: June 22, 2007
    Publication date: December 25, 2008
    Applicant: QUALCOMM Incorporated
    Inventor: Marjorio Rafanan