Patents by Inventor Mark A. Durlam
Mark A. Durlam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7747926Abstract: A memory device, such an MRAM device, includes self-healing reference bits (104) associated with a set of array bits (102). The memory performs an error detection step (e.g., using an error-correction coding (ECC) algorithm, to detect the presence of a set of errors within the data bits. One of the reference bits (104) is toggled to a different state if an error count is greater than a predetermined threshold. If the set of errors remains unchanged when subsequently read, the reference bit (104) is toggled back to its original state.Type: GrantFiled: May 2, 2006Date of Patent: June 29, 2010Assignee: Everspin Technologies, Inc.Inventors: Loren J. Wise, Thomas W. Andre, Mark A. Durlam, Eric J. Salter
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Patent number: 7511990Abstract: An integrated circuit device is provided which includes a heat source disposed in a substrate, and a Magnetic Tunnel Junction (“MTJ”) temperature sensor disposed over the heat source.Type: GrantFiled: September 30, 2005Date of Patent: March 31, 2009Assignee: EverSpin Technologies, Inc.Inventors: Young Sir Chung, Robert W. Baird, Mark A. Durlam
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Patent number: 7510883Abstract: Techniques of sensing a temperature of a heat source disposed in a substrate of an integrated circuit are provided. According to one exemplary method, a Magnetic Tunnel Junction (“MTJ”) temperature sensor is provided over the heat source. The MTJ temperature sensor comprises an MTJ core configured to output a current during operation thereof. The value of the current varies based on a resistance value of the particular MTJ core. The resistance value of the MTJ core varies as a function of the temperature of the heat source. A value of the current of the MTJ core can then be associated with a corresponding temperature of the heat source.Type: GrantFiled: September 30, 2005Date of Patent: March 31, 2009Assignee: EverSpin Technologies, Inc.Inventors: Young Sir Chung, Robert W. Baird, Mark A. Durlam
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Patent number: 7476329Abstract: A method for contacting an electrically conductive layer overlying a magnetoelectronics element includes forming a memory element layer overlying a dielectric region. A first electrically conductive layer is deposited overlying the memory element layer. A first dielectric layer is deposited overlying the first electrically conductive layer and is patterned and etched to form a first masking layer. Using the first masking layer, the first electrically conductive layer is etched. A second dielectric layer is deposited overlying the first masking layer and the dielectric region. A portion of the second dielectric layer is removed to expose the first masking layer. The second dielectric layer and the first masking layer are subjected to an etching chemistry such that the first masking layer is etched at a faster rate than the second dielectric layer. The etching exposes the first electrically conductive layer.Type: GrantFiled: February 2, 2005Date of Patent: January 13, 2009Assignee: EverSpin Technologies, Inc.Inventors: Gregory W. Grynkewich, Brian R. Butcher, Mark A. Durlam, Kelly Kyler, Charles A. Synder, Kenneth H. Smith, Clarence J. Tracy, Richard Williams
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Patent number: 7432150Abstract: A method of manufacturing a magnetoelectronic device includes providing an electrically conducting material and an electrically insulating material adjacent to at least a portion of the electrically conducting material, and implanting a magnetic material into the electrically insulating material. The magnetic material increases the magnetic permeability of the electrically insulating material. The implant may be a blanket or a targeted implant.Type: GrantFiled: February 10, 2006Date of Patent: October 7, 2008Assignee: EverSpin Technologies, Inc.Inventors: Mark A. Durlam, Gloria J. Kerszykowski, Nicholas D. Rizzo, Eric J. Salter, Loren J. Wise
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Publication number: 20080112214Abstract: A method and assembly for sensing a voltage with a memory cell (88) is provided. The memory cell includes first and second electrodes (96,112), first and second ferromagnetic bodies (104,108) positioned between the first and second electrodes and an insulating body (94) positioned between the first and second ferromagnetic bodies. The first electrode is electrically connected to a first portion of a microelectronic assembly (47). The second electrode is electrically connected to a second portion of the microelectronic assembly. The voltage across the first and second portions of the microelectronic assembly is determined based on an electrical resistance of the memory cell. The memory cell may be a magnetoresistive random access memory (MRAM) cell. In one embodiment, the memory cell is a magnetic tunnel junction (MTJ) memory cell.Type: ApplicationFiled: October 30, 2006Publication date: May 15, 2008Inventors: Young Sir Chung, Robert W. Baird, Mark A. Durlam, Pon Sung Ku
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Patent number: 7324369Abstract: An integrated circuit device includes a magnetic random access memory (“MRAM”) architecture and a smart power integrated circuit architecture formed on the same substrate using the same fabrication process technology. The fabrication process technology is a modular process having a front end process and a back end process. In the example embodiment, the smart power architecture includes a power circuit component, a digital logic component, and an analog control component formed by the front end process, and a sensor architecture formed by the back end process. The MRAM architecture includes an MRAM circuit component formed by the front end process and an MRAM cell array formed by the back end process. In one practical embodiment, the sensor architecture includes a sensor component that is formed from the same magnetic tunnel junction core material utilized by the MRAM cell array.Type: GrantFiled: June 30, 2005Date of Patent: January 29, 2008Assignee: Freescale Semiconductor, Inc.Inventors: Young Sir Chung, Robert W. Baird, Mark A. Durlam, Gregory W. Grynkewich, Eric J. Salter
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Patent number: 7279341Abstract: A method for fabricating a flux concentrating system (62) for use in a magnetoelectronics device is provided. The method comprises the steps of providing a bit line (10) formed in a substrate (12) and forming a first material layer (24) overlying the bit line (10) and the substrate (12). Etching is performed to form a trench (58) in the first material layer (24) and a cladding layer (56) is deposited in the trench (52). A buffer material layer (58) is formed overlying the cladding layer (56) and a portion of the buffer material layer (58) and a portion of the cladding layer (56) is removed.Type: GrantFiled: May 9, 2005Date of Patent: October 9, 2007Assignee: Freescale Semiconductor, Inc.Inventors: Thomas V. Meixner, Gregory W. Grynkewich, Jaynal A. Molla, J. Jack Ren, Richard G. Williams, Brian R. Butcher, Mark A. Durlam
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Patent number: 7271011Abstract: Techniques are provided for sensing a first current produced by an active circuit component. According to these techniques, a current sensor is disposed over the active circuit component. The current sensor includes a Magnetic Tunnel Junction (“MTJ”) core disposed between a first conductive layer and a second conductive layer. The MTJ core can be used to sense the first current and produce a second current based on the first current sensed at the MTJ core.Type: GrantFiled: October 28, 2005Date of Patent: September 18, 2007Assignee: Freescale Semiconductor, Inc.Inventors: Young Sir Chung, Robert W. Baird, Mark A. Durlam
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Patent number: 7264985Abstract: An integrated circuit device (300) comprises a substrate (301) and MRAM architecture (314) formed on the substrate (308). The MRAM architecture (314) includes a MRAM circuit (318) formed on the substrate (301); and a MRAM cell (316) coupled to and formed above the MRAM circuit (318). Additionally a passive device (320) is formed in conjunction with the MRAM cell (316). The passive device (320) can be one or more resistors and one or more capacitor. The concurrent fabrication of the MRAM architecture (314) and the passive device (320) facilitates an efficient and cost effective use of the physical space available over active circuit blocks of the substrate (404, 504), resulting in three-dimensional integration.Type: GrantFiled: August 31, 2005Date of Patent: September 4, 2007Assignee: Freescale Semiconductor, Inc.Inventors: Young Sir Chung, Robert W. Baird, Mark A. Durlam, Gregory W. Grynkewich, Eric J. Salter
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Patent number: 7262069Abstract: An integrated circuit device includes a magnetic random access memory (“MRAM”) architecture and at least one inductance element formed on the same substrate using the same fabrication process technology. The inductance element, which may be an inductor or a transformer, is formed at the same metal layer (or layers) as the program lines of the MRAM architecture. Any available metal layer in addition to the program line layers can be added to the inductance element to enhance its efficiency. The concurrent fabrication of the MRAM architecture and the inductance element facilitates an efficient and cost effective use of the physical space available over active circuit blocks of the substrate, resulting in three-dimensional integration.Type: GrantFiled: June 7, 2005Date of Patent: August 28, 2007Assignee: Freescale Semiconductor, Inc.Inventors: Young Sir Chung, Robert W. Baird, Mark A. Durlam, Bradley N. Engel
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Patent number: 7239543Abstract: An integrated circuit device includes an active circuit component and a current sensor. The active circuit component may be coupled between a first conductive layer and a second conductive layer, and is configured to produce a first current. The current sensor is disposed over the active circuit component. The current sensor may includes a Magnetic Tunnel Junction (“MTJ”) core disposed between the first conductive layer and the second conductive layer. The MTJ core is configured to sense the first current and produce a second current based on the first current sensed at the MTJ core.Type: GrantFiled: October 28, 2005Date of Patent: July 3, 2007Assignee: Freescale Semiconductor, Inc.Inventors: Young Sir Chung, Robert W. Baird, Mark A. Durlam, Gregory W. Grynkewich, Eric J. Salter, Jiang-Kai Zuo
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Patent number: 7169622Abstract: Fabricating a magnetoresistive random access memory cell and a structure for a magnetoresistive random access memory cell begins by providing a substrate having a transistor formed therein. A contact element is formed electrically coupled to the transistor and a dielectric material is deposited within an area partially bounded by the contact element. A digit line is formed within the dielectric material, the digit line overlying a portion of the contact element. A conductive layer is formed overlying the digit line and in electrical communication with the contact element.Type: GrantFiled: August 5, 2004Date of Patent: January 30, 2007Assignee: Freescale Semiconductor, Inc.Inventors: Gregory W. Grynkewich, Brian R. Butcher, Mark A. Durlam, Clarence J. Tracy
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Patent number: 7154772Abstract: A magnetoresistive random access memory (MRAM) has separate read and write paths. This reduces the peripheral circuitry by not requiring switching between read and write functions on a particular line. By having the paths dedicated to either read signals or write signals, the voltage levels can be optimized for these functions. The select transistors, which are part of only the read function, may be of the low-voltage type because they do not have to receive the relatively higher voltages of the write circuitry. Similarly, the write voltages do not have to be degraded to accommodate the lower-voltage type transistors. The size of the overall memory is kept efficiently small while improving performance. The memory cells are grouped so that adjacent to groups are coupled to a common global bit line which reduces the space required for providing the capacitance-reducing group approach to memory cell selection.Type: GrantFiled: March 9, 2005Date of Patent: December 26, 2006Assignee: Freescale Semiconductor, Inc.Inventors: Joseph J. Nahas, Thomas W. Andre, Chitra K. Subramanian, Bradley J. Garni, Mark A. Durlam
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Patent number: 7144744Abstract: Magnetoelectronic memory element structures and methods for making such structures using a barrier layer as a material removal stop layer are provided. The methods comprise forming a digit line disposed at least partially within a dielectric layer. The dielectric material layer overlies an interconnect stack. A void space is etched in the dielectric layer to expose the interconnect stack. A conductive-barrier layer having a first portion and a second portion is deposited. The first portion overlies the digit line and the second portion is disposed within the void space and in electrical communication with the interconnect stack. A memory element layer is formed overlying the first portion and an electrode layer is deposited overlying the memory element layer. The electrode layer and the memory element layer are then patterned and etched.Type: GrantFiled: October 27, 2004Date of Patent: December 5, 2006Assignee: Freescale Semiconductor, Inc.Inventors: Mitchell T. Lien, Mark A. Durlam, Thomas V. Meixner, Loren J. Wise
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Patent number: 7105363Abstract: A method for fabricating a cladded conductor (42) for use in a magnetoelectronics device is provided. The method includes providing a substrate (10) and forming a conductive barrier layer (12) overlying the substrate (10). A dielectric layer (16) is formed overlying the conductive barrier layer (12) and a conducting line (20) is formed within a portion of the dielectric layer (16). The dielectric layer (16) is removed and a flux concentrator (30) is formed overlying the conducting line (20).Type: GrantFiled: March 16, 2005Date of Patent: September 12, 2006Assignee: Freescale Semiconductor, Inc.Inventors: Mark A. Durlam, Jeffrey H. Baker, Brian R. Butcher, Mark F. Deherrera, John J. D'Urso, Earl D. Fuchs, Gregory W. Grynkewich, Kelly W. Kyler, Jaynal A. Molla, J. Jack Ren, Nicholas D. Rizzo
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Patent number: 7087972Abstract: Magnetoelectronic device structures and methods for fabricating the same are provided. One method comprises forming a first and a second conductor. The first conductor is electrically coupled to an interconnect stack. A first insulating layer is deposited overlying the first conductor and the second conductor. A via is etched to substantially expose the first conductor. A protective capping layer is deposited by electroless deposition within the via and is electrically coupled to the first conductor. A magnetic memory element layer is formed within the via and overlying the second insulating layer and the second conductor.Type: GrantFiled: January 31, 2005Date of Patent: August 8, 2006Assignee: Freescale Semiconductor, Inc.Inventors: J. Jack Ren, Brian R. Butcher, Mark A. Durlam, Gregory W. Grynkewich
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Patent number: 7031183Abstract: A magnetoresistive random access memory (MRAM) is embedded with another circuit type. Logic, such as a processing unit, is particularly well-suited circuit type for embedding with MRAM. The embedding is made more efficient by using a metal layer that is used as part of the interconnect for the other circuit also as part of the MRAM cell. The MRAM cells are all written by program lines, which are the two lines that cross to define a cell to be written. Thus, the design is simplified because there is commonality of usage of the metal line that is used for one of the program lines for the MRAM and for one of the interconnect lines for the logic.Type: GrantFiled: December 8, 2003Date of Patent: April 18, 2006Assignee: Freescale Semiconductor, Inc.Inventors: Gloria J. Kerszykowski, Li Hsin Chang, Mark A. Durlam, Mitchell T. Lien, Thomas V. Meixner, Loren J. Wise
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Patent number: 6943038Abstract: A method for fabricating a flux concentrating system (62) for use in a magnetoelectronics device is provided. The method comprises the steps of providing a bit line (10) formed in a substrate (12) and forming a first material layer (24) overlying the bit line (10) and the substrate (12). Etching is performed to form a trench (58) in the first material layer (24) and a cladding layer (56) is deposited in the trench (52). A buffer material layer (58) is formed overlying the cladding layer (56) and a portion of the buffer material layer (58) and a portion of the cladding layer (56) is removed.Type: GrantFiled: December 19, 2002Date of Patent: September 13, 2005Assignee: Freescale Semiconductor, Inc.Inventors: Thomas V. Meixner, Gregory W. Grynkewich, Jaynal A. Molla, J. Jack Ren, Richard G. Williams, Brian R. Butcher, Mark A. Durlam
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Patent number: 6936763Abstract: Shielded electronic integrated circuit apparatus (5) includes a substrate (10), with an eletronic integrated circuit (15) formed thereon, and a dielectric region (12) positioned on the electronic integrated circuit. The dielectric region and the substrate are substantially surrounded by lower and upper magnetic material regions (26, 30), deposited using electrochemical deposition, and magnetic material layers on each side (32, 34). Each of the lower and upper magnetic material regions preferably include a glue layer (36, 40), a seed layer (28, 24), and an electrochemically deposited magnetic material layer (26, 30). Generally, the electrochemically deposited magnetic material layer can be conveniently deposited by electroplating.Type: GrantFiled: June 28, 2002Date of Patent: August 30, 2005Assignee: Freescale Semiconductor, Inc.Inventors: Nicholas D. Rizzo, Mark A. Durlam, Michael J. Roll, Kelly Kyler, Jaynal A. Molla