Patents by Inventor Mark A. Helm

Mark A. Helm has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7413946
    Abstract: Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within wells defining the second type standard Vt devices, and each of the first and second type low Vt devices. Wells that define the locations of second type standard Vt devices are masked, and a second voltage threshold implant adjustment is performed to the wells defining the first type standard Vt devices, and each of the first and second type low Vt devices. Doped polysilicon gate stacks are then formed over the wells. Performance characteristics and control of each device Vt is controlled by regulating at least one of the first and second voltage threshold implant adjustments, and the polysilicon gate stack doping.
    Type: Grant
    Filed: December 4, 2006
    Date of Patent: August 19, 2008
    Assignee: Micron Technology, Inc.
    Inventors: Mark Helm, Xianfeng Zhou
  • Publication number: 20080151646
    Abstract: Some embodiments include a device having memory cells coupled to a well of a semiconductor substrate, and a select transistor coupled between the memory cells and a bit line of the device. The device may have a first circuit to raise a well voltage of the well from a first well voltage level to a second well voltage level during an erase operation. The first circuit may hold the well at the second well voltage level for a time interval during the erase operation. The device may have a second circuit to raise a voltage of the gate of the select transistor from a first gate voltage level to a second gate voltage level, which may be lower than the second well voltage level. The second circuit may hold the gate at the second gate voltage level for a time interval during the erase operation. Other embodiments including additional apparatus, systems, and methods are disclosed.
    Type: Application
    Filed: December 21, 2006
    Publication date: June 26, 2008
    Inventors: Daniel H. Doyle, Mark Helm, Andrei Mihnea
  • Patent number: 7358561
    Abstract: A NAND memory device has a source line connected to two or more columns of serially-connected floating-gate transistors. The source line includes a first conductive layer formed on a substrate and coupled to source select gates associated with the two or more columns of serially-connected floating-gate transistors. The source line also includes a second conductive layer formed on the first conductive layer, where the second layer has a greater electrical conductivity than the first conductive layer.
    Type: Grant
    Filed: August 23, 2007
    Date of Patent: April 15, 2008
    Assignee: Micron Technology, Inc.
    Inventors: Mark A. Helm, Roger W. Lindsay
  • Publication number: 20080042216
    Abstract: Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within wells defining the second type standard Vt devices, and each of the first and second type low Vt devices. Wells that define the locations of second type standard Vt devices are masked, and a second voltage threshold implant adjustment is performed to the wells defining the first type standard Vt devices, and each of the first and second type low Vt devices. Doped polysilicon gate stacks are then formed over the wells. Performance characteristics and control of each device Vt is controlled by regulating at least one of the first and second voltage threshold implant adjustments, and the polysilicon gate stack doping.
    Type: Application
    Filed: October 24, 2007
    Publication date: February 21, 2008
    Inventors: Mark Helm, Xianfeng Zhou
  • Patent number: 7332419
    Abstract: An integrated circuit transistor is fabricated with a trench gate having nonconductive sidewalls. The transistor is surrounded by an isolation trench filled with a nonconductive material. The sidewalls of the gate trench are formed of the nonconductive material and are substantially free of unetched substrate material. As a result, the sidewalls of the gate trench do not form an undesired conductive path between the source and the drain of the transistor, thereby advantageously reducing the amount of parasitic current that flows between the source and drain during operation.
    Type: Grant
    Filed: January 20, 2005
    Date of Patent: February 19, 2008
    Assignee: Micron Technology, Inc.
    Inventors: Michael Smith, Mark Helm, Kirk Prall
  • Publication number: 20080013102
    Abstract: A sensor device (100) comprises a holding body (10), at least one deflectable sensor element (20) fixed to the holding body (10), and a sensor array (30) with a plurality of sensitive layers (31) arranged on a surface (21) of the at least one sensor element (20), wherein each of the sensitive layers (31) is adapted to couple at least one probe substance to be sensed, wherein the at least one sensor element (20) has a spring constant below 5 N/m. Furthermore, a measuring device comprising the sensor device and a method of investigating a sample for sensing at least one probe molecule in the sample are described.
    Type: Application
    Filed: April 13, 2007
    Publication date: January 17, 2008
    Applicants: Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V., a corporation of Germany, Surface Imaging Systems Rastersonden- und Sensormesstechnik GmbH, a corporation of Germany, Ruprecht-Karls-Universitat Heidelberg, a corporation of Germany
    Inventors: Rudiger Berger, Mark Helm, Frank Saurenbach
  • Publication number: 20070290255
    Abstract: A NAND memory device has a source line connected to two or more columns of serially-connected floating-gate transistors. The source line includes a first conductive layer formed on a substrate and coupled to source select gates associated with the two or more columns of serially-connected floating-gate transistors. The source line also includes a second conductive layer formed on the first conductive layer, where the second layer has a greater electrical conductivity than the first conductive layer.
    Type: Application
    Filed: August 23, 2007
    Publication date: December 20, 2007
    Inventors: Mark Helm, Roger Lindsay
  • Patent number: 7304353
    Abstract: Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within wells defining the second type standard Vt devices, and each of the first and second type low Vt devices. Wells that define the locations of second type standard Vt devices are masked, and a second voltage threshold implant adjustment is performed to the wells defining the first type standard Vt devices, and each of the first and second type low Vt devices. Doped polysilicon gate stacks are then formed over the wells. Performance characteristics and control of each device Vt is controlled by regulating at least one of the first and second voltage threshold implant adjustments, and the polysilicon gate stack doping.
    Type: Grant
    Filed: June 7, 2005
    Date of Patent: December 4, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Mark Helm, Xianfeng Zhou
  • Publication number: 20070264784
    Abstract: A dielectric layer (e.g., an interpoly dielectric layer) is deposited over low and high voltage devices of a peripheral memory device. The dielectric behaves as an oxidation and wet oxide etch barrier. The dielectric prevents the devices from being stripped by a wet oxide etch that can result in the exposure of the silicon corners. The exposure of a silicon corner may increase thinning of a gate oxide at the field edge. This causes variability and unreliability in the device. The dielectric is not removed from a device until the device is ready for processing. That is, the dielectric remains on a device until the growing of a gate oxide on that device has begun. This reduces the exposure of the silicon corner. Hedges that result may be removed by exposing a trench in the field oxide at the hedge.
    Type: Application
    Filed: July 18, 2007
    Publication date: November 15, 2007
    Applicant: Micron Technology, Inc.
    Inventors: Graham Wolstenholme, Mark Helm
  • Patent number: 7279710
    Abstract: An integrated circuit transistor is fabricated with a trench gate having nonconductive sidewalls. The transistor is surrounded by an isolation trench filled with a nonconductive material. The sidewalls of the gate trench are formed of the nonconductive material and are substantially free of unetched substrate material. As a result, the sidewalls of the gate trench do not form an undesired conductive path between the source and the drain of the transistor, thereby advantageously reducing the amount of parasitic current that flows between the source and drain during operation.
    Type: Grant
    Filed: September 20, 2005
    Date of Patent: October 9, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Michael Smith, Mark Helm, Kirk Prall
  • Patent number: 7274065
    Abstract: A NAND memory device has a source line connected to two or more columns of serially-connected floating-gate transistors. The source line includes a first conductive layer formed on a substrate and coupled to source select gates associated with the two or more columns of serially-connected floating-gate transistors. The source line also includes a second conductive layer formed on the first conductive layer, where the second layer has a greater electrical conductivity than the first conductive layer.
    Type: Grant
    Filed: August 23, 2005
    Date of Patent: September 25, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Mark A. Helm, Roger W. Lindsay
  • Patent number: 7265012
    Abstract: Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within wells defining the second type standard Vt devices, and each of the first and second type low Vt devices. Wells that define the locations of second type standard Vt devices are masked, and a second voltage threshold implant adjustment is performed to the wells defining the first type standard Vt devices, and each of the first and second type low Vt devices. Doped polysilicon gate stacks are then formed over the wells. Performance characteristics and control of each device Vt is controlled by regulating at least one of the first and second voltage threshold implant adjustments, and the polysilicon gate stack doping.
    Type: Grant
    Filed: August 31, 2005
    Date of Patent: September 4, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Mark Helm, Xianfeng Zhou
  • Patent number: 7262102
    Abstract: A dielectric layer (e.g., an interpoly dielectric layer) is deposited over low and high voltage devices of a peripheral memory device. The dielectric behaves as an oxidation and wet oxide etch barrier. The dielectric prevents the devices from being stripped by a wet oxide etch that can result in the exposure of the silicon corners. The exposure of a silicon corner may increase thinning of a gate oxide at the field edge. This causes variability and unreliability in the device. The dielectric is not removed from a device until the device is ready for processing. That is, the dielectric remains on a device until the growing of a gate oxide on that device has begun. This reduces the exposure of the silicon corner. Hedges that result may be removed by exposing a trench in the field oxide at the hedge.
    Type: Grant
    Filed: September 23, 2005
    Date of Patent: August 28, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Graham R Wolstenholme, Mark A Helm
  • Patent number: 7241662
    Abstract: A dielectric layer (e.g., an interpoly dielectric layer) is deposited over low and high voltage devices of a peripheral memory device. The dielectric behaves as an oxidation and wet oxide etch barrier. The dielectric prevents the devices from being stripped by a wet oxide etch that can result in the exposure of the silicon corners. The exposure of a silicon corner may increase thinning of a gate oxide at the field edge. This causes variability and unreliability in the device. The dielectric is not removed from a device until the device is ready for processing. That is, the dielectric remains on a device until the growing of a gate oxide on that device has begun. This reduces the exposure of the silicon corner. Hedges that result may be removed by exposing a trench in the field oxide at the hedge.
    Type: Grant
    Filed: June 24, 2002
    Date of Patent: July 10, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Graham R Wolstenholme, Mark A Helm
  • Publication number: 20070093017
    Abstract: Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within wells defining the second type standard Vt devices, and each of the first and second type low Vt devices. Wells that define the locations of second type standard Vt devices are masked, and a second voltage threshold implant adjustment is performed to the wells defining the first type standard Vt devices, and each of the first and second type low Vt devices. Doped polysilicon gate stacks are then formed over the wells. Performance characteristics and control of each device Vt is controlled by regulating at least one of the first and second voltage threshold implant adjustments, and the polysilicon gate stack doping.
    Type: Application
    Filed: December 4, 2006
    Publication date: April 26, 2007
    Inventors: Mark Helm, Xianfeng Zhou
  • Publication number: 20070093016
    Abstract: Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within wells defining the second type standard Vt devices, and each of the first and second type low Vt devices. Wells that define the locations of second type standard Vt devices are masked, and a second voltage threshold implant adjustment is performed to the wells defining the first type standard Vt devices, and each of the first and second type low Vt devices. Doped polysilicon gate stacks are then formed over the wells. Performance characteristics and control of each device Vt is controlled by regulating at least one of the first and second voltage threshold implant adjustments, and the polysilicon gate stack doping.
    Type: Application
    Filed: December 4, 2006
    Publication date: April 26, 2007
    Inventors: Mark Helm, Xianfeng Zhou
  • Patent number: 7202129
    Abstract: A source line is formed by forming a source slot in a bulk insulation layer overlying a substrate to expose a portion of a substrate within the source slot, where the exposed portion of the substrate includes source regions of select gates associated with two or more columns of serially-connected floating-gate transistors formed on the substrate. A layer of epitaxial silicon is grown on the exposed portion so as to partially fill the source slot. A conductive layer is formed on the bulk insulation layer and on the layer of epitaxial silicon so as to substantially fill an unfilled portion of the source slot. The conductive layer is removed from a surface of the bulk insulation layer.
    Type: Grant
    Filed: October 11, 2005
    Date of Patent: April 10, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Mark A. Helm, Roger W. Lindsay
  • Patent number: 7189607
    Abstract: Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within wells defining the second type standard Vt devices, and each of the first and second type low Vt devices. Wells that define the locations of second type standard Vt devices are masked, and a second voltage threshold implant adjustment is performed to the wells defining the first type standard Vt devices, and each of the first and second type low Vt devices. Doped polysilicon gate stacks are then formed over the wells. Performance characteristics and control of each device Vt is controlled by regulating at least one of the first and second voltage threshold implant adjustments, and the polysilicon gate stack doping.
    Type: Grant
    Filed: September 1, 2004
    Date of Patent: March 13, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Mark Helm, Xianfeng Zhou
  • Patent number: 7176086
    Abstract: Field-effect transistors, select gates, and select lines have first and second conductive layers separated by an interlayer dielectric layer. A conductive strap is disposed on either side of the first and second conductive layers. Each strap electrically interconnects the first and second conductive layers.
    Type: Grant
    Filed: December 7, 2004
    Date of Patent: February 13, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Michael Violette, Mark A. Helm
  • Patent number: 7141850
    Abstract: In one aspect, the invention includes a method of forming a gated semiconductor assembly, comprising: a) forming a silicon nitride layer over and against a floating gate; and b) forming a control gate over the silicon nitride layer. In another aspect, the invention includes a method of forming a gated semiconductor assembly, comprising: a) forming a floating gate layer over a substrate; b) forming a silicon nitride layer over the floating gate layer, the silicon nitride layer comprising a first portion and a second portion elevationally displaced from the first portion, the first portion having a greater stoichiometric amount of silicon than the second portion; and c) forming a control gate over the silicon nitride layer.
    Type: Grant
    Filed: January 30, 2004
    Date of Patent: November 28, 2006
    Assignee: Micron Technology, Inc.
    Inventors: Mark A. Helm, Mark Fischer, John T. Moore, Scott Jeffrey DeBoer