Patents by Inventor Mark A. Hueschen

Mark A. Hueschen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods of monitoring thin film deposition
    Patent number: 6668618
    Abstract: Systems and methods of monitoring thin film deposition are described. In one aspect, a thin film deposition sensor includes an acoustical resonator (e.g., a thin film bulk acoustical resonator) that has an exposed surface and is responsive to thin film material deposits on the exposed surface. A substrate clip may be configured to attach the thin film deposition sensor to a substrate. A transceiver circuit may be configured to enable the thin film deposition sensor to be interrogated wirelessly. A method of monitoring a thin film deposition on a substrate also is described.
    Type: Grant
    Filed: April 23, 2001
    Date of Patent: December 30, 2003
    Assignee: Agilent Technologies, Inc.
    Inventors: John D. Larson, III, Herbert L. Ko, Richard K. Karlquist, Mark A. Hueschen, Kent W. Carey
  • Systems and methods of monitoring thin film deposition
    Patent number: 6651488
    Abstract: Systems and methods of monitoring thin film deposition are described. In one aspect, a thin film deposition sensor includes an acoustical resonator (e.g., a thin film bulk acoustical resonator) that has an exposed surface and is responsive to thin film material deposits on the exposed surface. A substrate clip may be configured to attach the thin film deposition sensor to a substrate. A transceiver circuit may be configured to enable the thin film deposition sensor to be interrogated wirelessly. A method of monitoring a thin film deposition on a substrate also is described.
    Type: Grant
    Filed: October 7, 2002
    Date of Patent: November 25, 2003
    Assignee: Agilent Technologies, Inc.
    Inventors: John D. Larson, III, Herbert L. Ko, Richard K. Karlquist, Mark A. Hueschen, Kent W. Carey
  • Systems and methods of monitoring thin film deposition
    Publication number: 20030041654
    Abstract: Systems and methods of monitoring thin film deposition are described. In one aspect, a thin film deposition sensor includes an acoustical resonator (e.g., a thin film bulk acoustical resonator) that has an exposed surface and is responsive to thin film material deposits on the exposed surface. A substrate clip may be configured to attach the thin film deposition sensor to a substrate. A transceiver circuit may be configured to enable the thin film deposition sensor to be interrogated wirelessly. A method of monitoring a thin film deposition on a substrate also is described.
    Type: Application
    Filed: October 7, 2002
    Publication date: March 6, 2003
    Inventors: John D. Larson, Herbert L. Ko, Richard K. Karlquist, Mark A. Hueschen, Kent W. Carey
  • Systems and methods of monitoring thin film deposition
    Publication number: 20020152803
    Abstract: Systems and methods of monitoring thin film deposition are described. In one aspect, a thin film deposition sensor includes an acoustical resonator (e.g., a thin film bulk acoustical resonator) that has an exposed surface and is responsive to thin film material deposits on the exposed surface. A substrate clip may be configured to attach the thin film deposition sensor to a substrate. A transceiver circuit may be configured to enable the thin film deposition sensor to be interrogated wirelessly. A method of monitoring a thin film deposition on a substrate also is described.
    Type: Application
    Filed: April 23, 2001
    Publication date: October 24, 2002
    Inventors: John D. Larson, Herbert L. Ko, Richard K. Karlquist, Mark A. Hueschen, Kent W. Carey