Abstract: An apparatus for delivery of a liquid. The apparatus includes a housing and a cradle for holding a container containing the liquid. The cradle is rotatably coupled to the housing. The cradle is rotatable between a first position and a second position. The apparatus further includes a reservoir for receiving the liquid from the container. The reservoir is coupled to the cradle and rotates with the cradle. The reservoir includes a passageway through which the liquid is able to flow downward for all positions the cradle is permitted to rotate to. The reservoir includes a cylinder for minimizing back flow of the liquid from the reservoir to the container. The reservoir also includes a first orifice for allowing the liquid to pass out of the reservoir, a second orifice for allowing an air bubble in the liquid to return to the reservoir, and a check valve for allowing air to pass into the reservoir.

Abstract: An apparatus for aligning adjacent surfaces for coplanarity and angle is described. The apparatus comprises a base plate, a plurality of support legs coupled to the base plate, a plurality of depth gauges coupled to the base plate, an angle coupled to the base plate, and leveling means coupled to an inclined surface. The inclined surface of the angle plate slopes towards the plurality of depth gauges. The inclined surface has a predetermined angle. A method for aligning first and second adjacent surfaces for coplanarity and relative angle is also described. The alignment apparatus is placed on a flat surface. The apparatus is calibrated so that all of the plurality of depth gauges read a first value. The apparatus is placed on the first and second adjacent process modules such that the support legs rest on the first adjacent process module and the plurality of depth gauges rest on the second adjacent process module.

Abstract: An apparatus for centering semiconductor loading and unloading arms is described. The apparatus comprises a cap and a ring. The cap comprises a first plate, substantially in the shape of an electrode, a lip affixed to the edge of the first plate for holding the first plate stationary in a lateral direction, and a pin affixed to a top of the first plate such that the pin is perpendicular to the first plate. The ring comprises a second plate substantially in the shape of a semiconductor material to be placed on the electrode, an aperture in the second plate, the diameter of the aperture being the same as the diameter of the pin, and a collar surrounding the aperture, wherein the collar is for holding the second plate.

Abstract: The present invention is an anode cathode parallelism gap gauge. The gauge is for determining the relative parallelism between two planar surfaces such as an anode and cathode in a relative ion chamber. The gauge sits on the anode on three points and then has the cathode extended into its volume. The cathode will then contact the measuring arms, of which there must be at least three, that statically latch measurement values onto a scalar device. Thus, the present invention provides a reliable and clean method of determining parallelism and distance between an anode and cathode or other surfaces.