Abstract: The present invention comprises a wafer boat, bath, or related components that are covered with a fluoropolymer coating. In a preferred form, the components have standard quartz structures that are covered with a protective fluoropolymer coating. In alternate embodiments, glass, plastic, or even metal is used for the structure of the boat or related components, then covered with a protective layer of fluoropolymer. In accordance with another preferred aspect, the coating is clear. In alternate embodiments, however, the coating includes a pigment. In some preferred embodiments, the coating comprises multiple layers with different colors for each layer so that wear will be readily apparent.

Abstract: This invention comprises a coating for equipment parts, particularly including chemical mechanical polishing equipment parts and other equipment that may experience wear or contaminant build-up. The coating includes a fluoropolymer based material that may also contain a colorant or pigment to visually contrast with particles or slurry that is deposited on the parts during use. In some embodiments, multiple layers are applied in contrasting colors so that when a layer closer to the surface begins to wear a lower layer will be readily visible, signaling that re-coating or replacement will soon be required.

Abstract: A combined battery and device apparatus and associated method. This apparatus includes a first conductive layer, a battery comprising a cathode layer; an anode layer, and an electrolyte layer located between and electrically isolating the anode layer from the cathode layer, wherein the anode or the cathode or both include an intercalation material, the battery disposed such that either the cathode layer or the anode layer is in electrical contact with the first conductive layer, and an electrical circuit adjacent face-to-face to and electrically connected to the battery. Some embodiments further include a photovoltaic cell. In some embodiments, the substrate includes a polymer having a melting point substantially below 700 degrees centigrade. In some embodiments, the substrate includes a glass. For example, some embodiments include a battery deposited directly on the back of a liquid-crystal display (LCD) device.

Abstract: A combined battery and device apparatus and associated method. This apparatus includes a first conductive layer, a battery comprising a cathode layer; an anode layer, and an electrolyte layer located between and electrically isolating the anode layer from the cathode layer, wherein the anode or the cathode or both include an intercalation material, the battery disposed such that either the cathode layer or the anode layer is in electrical contact with the first conductive layer, and an electrical circuit adjacent face-to-face to and electrically connected to the battery. Some embodiments further include a photovoltaic cell and/or thin-film capacitor. In some embodiments, the substrate includes a polymer having a melting point substantially below 700 degrees centigrade. In some embodiments, the substrate includes a glass. For example, some embodiments include a battery deposited directly on the back of a liquid-crystal display (LCD) device.

Abstract: A method of making a thin-film device including a substrate-supply station that supplies a substrate. The substrate has a first layer on the substrate. Also described is a method and device for depositing a second layer onto the first layer, wherein energy supplied to the second layer aids in layer formation without substantially heating the substrate. Some embodiments include depositing a photovoltaic cell. In some embodiments, the substrate is a flexible material supplied from a roll. Some embodiments include attaching an integrated circuit to the substrate and operatively coupling the integrated circuit to charge the battery from the photovoltaic cell.

Abstract: An improved interconnection system for attaching an improved cylindrical magnetron target to a rotatable flanged spindle incorporates an annular extension on the target, which fits over the edge of the spindle flange, facilitates centering the target on the spindle, and helps shield target sealing surfaces. The annular extension terminates in an inwardly-angled circumferential step. The target-spindle interconnection system includes a split clamping collar and a generally annular retainer ring that slidable over the spindle shaft and rotatable against the spindle flange, the retainer ring having external circumferential threads that are angled away from the flange. The split clamping collar has, at one end, an inwardly-angled lip that engages the overhanging step and, at the other end, inwardly-angled, internal, circumferential threads that engage the threads of the retainer ring to draw the target and spindle together as a unified assembly as the retainer ring is rotated.

Abstract: A method and apparatus are provided for protecting internal aluminum components of a plasma reactor from plasma-induced erosion. The components are coated, first with a dielectric layer, then with a thin layer of one or more metals selected from the group consisting of gold, chromium, platinum, silver and rhenium. The dielectric layer may either be grown or deposited. The metal layer is deposited, preferably using evaporative deposition.

Abstract: Planar magnetron targets are disclosed which include a backing plate which is grooved in the regions where erosion of the target material mainly occurs, thereby permitting greater erosion depth of the target material. The life of the target material may be further extended by employing an in-relief upper surface for the target material. The in-relief surface may be prepared by a number of well-known techniques, which include casting and computer-controlled plasma spray. The target material may be either sprayed on or bonded to the backing plate. For a preferred embodiment of the invention, the backing plate is grooved to create undercut ledges which retain the target material on the backing plate, even if adhesion between the surfaces of the target material and the backing plate material fails as the result of thermal cycling.

Abstract: This invention comprises a coating for equipment parts, particularly including chemical mechanical polishing equipment parts and other equipment that may experience wear or contaminant build-up. The coating includes a fluoropolymer based material that may also contain a colorant or pigment to visually contrast with particles or slurry that is deposited on the parts during use. In some embodiments, multiple layers are applied in contrasting colors so that when a layer closer to the surface begins to wear a lower layer will be readily visible, signaling that re-coating or replacement will soon be required.

Abstract: A fluid-tight union for reversably interconnecting lengths of coaxial pipe includes: a first annular fitting, having a circumferential flange, attachable to a connection end of a first length of pipe; a second annular fitting, having a circumferential shoulder, attachable to a connection end of a second length of pipe; a clamping collar comprised of arcuate segments which incorporate both an inwardly-angled clamping ledge that engages an overhanging step on the circumferential shoulder of the second annular fitting and at least one internal, inwardly-angled, spiral, circumferential thread spaced apart from the clamping ledge; and a retainer ring sized so as to be slidable over the first annular fitting, and rotatable against the rear face of the circumferential flange, the retainer ring incorporating external, spiral, circumferential threads that are angled away from the flange, the external threads of the retainer ring engaging the internal threads of the clamping collar to draw the clamping ledge and engage

Abstract: An improved interconnection system for attaching an improved cylindrical magnetron target to a rotatable flanged spindle incorporates an annular extension on the target, which fits over the edge of the spindle flange, facilitates centering the target on the spindle, and helps shield target sealing surfaces. The annular extension terminates in an inwardly-angled circumferential step. The target-spindle interconnection system includes a split clamping collar and a generally annular retainer ring that slidable over the spindle shaft and rotatable against the spindle flange, the retainer ring having external circumferential threads that are angled away from the flange. The split clamping collar has, at one end, an inwardly-angled lip that engages the overhanging step and, at the other end, inwardly-angled, internal, circumferential threads that engage the threads of the retainer ring to draw the target and spindle together as a unified assembly as the retainer ring is rotated.

Abstract: A fluid-tight pipe union includes: first and second annular fittings attachable to a connection ends of first and second lengths of pipe, respectively, the fitting mating together at a junction, the first fitting incorporating a circumferential flange, said flange having a rear face and front face which faces said second length of pipe, the second fitting having a circumferential shoulder terminating in an inwardly-angled, overhanging circumferential step that faces away from said junction; a clamping collar comprised of arcuate segments, which are collectively sized to generally and coaxially surround both said first and second fittings, the collar incorporating, both an inwardly-angled clamping ledge that engages the overhanging step of the second fitting and at least one internal, inwardly-angled, spiral, circumferential thread spaced apart from said clamping ledge; and a retainer ring sized so as to be slidable over said first fitting, and rotatable against the rear face of said circumferential flange, sa

Abstract: An improved interconnection system for attaching an improved cylindrical magnetron target to a rotatable flanged spindle incorporates an annular extension on the target, which fits over the edge of the spindle flange, facilitates centering the target on the spindle, and helps shield target sealing surfaces. The annular extension terminates in an inwardly-angled circumferential step. The target-spindle interconnection system includes a split clamping collar and generally annular retainer ring that slidable over the spindle shaft and rotatable against the spindle flange, the retainer ring having external circumferential threads that are angled away from the flange. The split clamping collar has, at one end, an inwardly-angled lip that engages the overhanging step and, at the other end, inwardly-angled, internal, circumferential threads that engage the threads of the retainer ring to draw the target and spindle together as a unified assembly as the retainer ring is rotated.

Abstract: A combined battery and wireless-communications apparatus and method. In some embodiments, the apparatus includes a support, a first conductive layer deposited on a first surface area of the support, a thin-film battery including a cathode layer, a solid-state electrolyte layer, and an anode layer deposited such that either the anode layer or the cathode layer is in electrical contact with the first conductive layer, an antenna mounted to the support structure, and an electronic communications circuit mounted to the support and electrically coupled to the battery and the antenna to transceive radio communications. Other embodiments include an energy-receiving device mounted to the support structure, and an electronic communications circuit mounted to the support structure and including a recharging circuit, the recharging circuit electrically coupled to the battery and the energy-receiving device to recharge the battery using energy received by the energy-receiving device.

Abstract: An electrically powered device includes a shell, and a battery integrated with the shell. The electrically powered device also includes a trace, and a site adapted to receive an electrically powered component, wherein the battery, the trace and the electrically powered component form a portion of a circuit. The electrically shell may be a portion of an enclosure. The battery is formed within the shell and may be comprised of one or a plurality of deposited layers.

Abstract: A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists in controlling the growth and stoichiometry of the film. The method allows for the fabrication of ultrathin films such as electrolyte films and dielectric films.

Abstract: A system for making a thin-film device includes a substrate-supply station that supplies a substrate having a major surface area. The substrate has a first layer on a first surface area of the substrate's major surface area. Also included is a device for depositing a second layer onto the first layer, wherein the device supplies energy to the second layer to aid in layer formation without substantially heating the substrate.

Abstract: A combined battery and device apparatus and associated method. This apparatus includes a first conductive layer, a battery comprising a cathode layer; an anode layer, and an electrolyte layer located between and electrically isolating the anode layer from the cathode layer, wherein the anode or the cathode or both include an intercalation material, the battery disposed such that either the cathode layer or the anode layer is in electrical contact with the first conductive layer, and an electrical circuit adjacent face-to-face to and electrically connected to the battery. Some embodiments further include a photovoltaic cell. In some embodiments, the substrate includes a polymer having a melting point substantially below 700 degrees centigrade. In some embodiments, the substrate includes a glass. For example, some embodiments include a battery deposited directly on the back of a liquid-crystal display (LCD) device.

Abstract: A method and system for fabricating solid-state energy-storage and energy-conversion devices including fabrication of films for devices without an anneal step, especially for the fabrication of supercapacitors and photovoltaic cells. A film is fabricated by depositing a first material layer to a location. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists the growth of the crystalline structure of the film and controls stoichiometry.

Abstract: A seat belt retractor is provided with an energy management system that achieves a known, predictable dissipation of energy which allows the force load on the shoulder belt and an amount of belt protraction to be carefully controlled for a given vehicle's crash characteristics. At shoulder belt loads below the onset force level, the inertia or web-sensitive locks lock both the reel and reel shaft against rotation and belt protraction with no energy dissipation. At shoulder belt loads above the onset force level, the reel rotates relative to the locked shaft and moves an extrusion die and a bushing on the reel shaft relative to one another and deforms the wall of the bushing thereby dissipating energy. The extrusion die can be formed integrally on the reel shaft with the driver nut pushing the bushing axially onto the die section of the shaft to deform the bushing.