Patents by Inventor Mark A. Salsbery

Mark A. Salsbery has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas agitated liquid etcher
    Patent number: 5846374
    Abstract: A liquid etch apparatus including an outer tank for holding a liquid etch solution, which has included therein an inner cylindrical member positioned in the outer tank. At one end of the inner cylindrical member, a sparger or other gas supply means may be provided. Filters are provided between the inner cylindrical member and the outer tank. Substrates are secured in the inner tank and a propeller is provided below the substrates. Gas is introduced into the inner cylindrical member during the etch process which creates a pressure gradient between the inner tank and the outer tank, forcing particulate matter carried by the gaseous particles to circulate around to the filters.
    Type: Grant
    Filed: October 3, 1996
    Date of Patent: December 8, 1998
    Assignee: Elantec Semiconductor, Inc.
    Inventors: Sameer Parab, Mark A. Salsbery