Abstract: A bi-directional electrostatic microvalve includes a membrane electrode that is controlled by application of voltage to fixed electrodes disposed on either side of the membrane electrode. Dielectric insulating layers separate the electrodes. One of the fixed electrodes defines a microcavity. Microfluidic channels formed into the electrodes provide fluid to the microcavity. A central pad defined in the microcavity places a portion of the second electrode close to the membrane electrode to provide a quick actuation while the microcavity reduces film squeezing pressure of the membrane electrode. In preferred embodiment microvalves, low surface energy and low surface charge trapping coatings, such as fluorocarbon films made from cross-linked carbon di-fluoride monomers or surface monolayers made from fluorocarbon terminated silanol compounds coatings coat the electrode low bulk charge trapping dielectric layers limit charge trapping and other problems and increase device lifetime operation.

Abstract: A portable gas analyzer comprising an integrated micro-flame ionization detector (micro-FID), a micro-gas chromatograph (micro-GC), an electrolyzer, and a flame-shaped electrode are provided. The components of the portable gas analyzer can be integrated into a single “lunchbox” sized housing with all the peripherals required to operate the micro-GC/FID without an external power and gas supply.

Abstract: A method of forming a patterned layer of a material on a substrate includes forming a layer of the material on a stamp, and contacting the stamp with a first substrate comprising a pattern of protruding and recessed features to bring a first portion of the layer into conformal contact with the protruding features. The stamp is then removed from the first substrate. The first portion of the layer remains in conformal contact with the protruding features, and a second portion of the layer opposite the recessed features is removed with the stamp. Accordingly, a patterned layer is formed on the stamp inverse to the pattern on the first substrate. The method may further include transferring the patterned layer on the stamp to a second substrate.

Abstract: Novel metal organic framework (MOF) molecules and methods of synthesizing them are described. MOFs are organometallic crystalline structures that have high sorption capacity due to high surface area, tailorable selectivity, an inert nature, and thermal stability at high temperatures. MOFs may be used as sorbents in preconcentrators for analytical devices to provide orders of magnitude of improved sensitivity in analyte detection. MOFs are also useful as sorbents in new compact and portable micropreconcentrator designs such as a modified purge and trap system and a multi-valve microelectromechanical system (MEMS) to achieve high gain in analyte detection. Further, MOFs may be used as coatings for novel microstructure arrays in micropreconcentrators where the microstructures are designed to increase the surface area to volume ratio inside the micropreconcentrator while minimizing the pressure drop across the micropreconcentrator.

Abstract: A method of forming a patterned layer of a material on a substrate includes forming a layer of the material on a stamp, and contacting the stamp with a first substrate comprising a pattern of protruding and recessed features to bring a first portion of the layer into conformal contact with the protruding features. The stamp is then removed from the first substrate. The first portion of the layer remains in conformal contact with the protruding features, and a second portion of the layer opposite the recessed features is removed with the stamp. Accordingly, a patterned layer is formed on the stamp inverse to the pattern on the first substrate. The method may further include transferring the patterned layer on the stamp to a second substrate.

Abstract: Novel metal organic framework (MOF) molecules and methods of synthesizing them are described. MOFs are organometallic crystalline structures that have high sorption capacity due to high surface area, tailorable selectivity, an inert nature, and thermal stability at high temperatures. MOFs may be used as sorbents in preconcentrators for analytical devices to provide orders of magnitude of improved sensitivity in analyte detection. MOFs are also useful as sorbents in new compact and portable micropreconcentrator designs such as a modified purge and trap system and a multi-valve microelectromechanical system (MEMS) to achieve high gain in analyte detection. Further, MOFs may be used as coatings for novel microstructure arrays in micropreconcentrators where the microstructures are designed to increase the surface area to volume ratio inside the micropreconcentrator while minimizing the pressure drop across the micropreconcentrator.

Abstract: A method of bonding layers to form a structure, comprises curing a first adhesive while squeezing a first layer and a multilayer structure together between a first backing and a second backing. The multilayer structure comprises a substrate and a second layer, and the first adhesive is between and in contact with the first layer and the second layer. Furthermore, the first layer and the second layer each have a thickness of at most 100 ?m, and at least one of the first backing and the second backing comprises a first elastic polymer.

Abstract: A bi-directional electrostatic microvalve includes a membrane electrode that is controlled by application of voltage to fixed electrodes disposed on either side of the membrane electrode. Dielectric insulating layers separate the electrodes. One of the fixed electrodes defines a microcavity. Microfluidic channels formed into the electrodes provide fluid to the microcavity. A central pad defined in the microcavity places a portion of the second electrode close to the membrane electrode to provide a quick actuation while the microcavity reduces film squeezing pressure of the membrane electrode. In preferred embodiment microvalves, low surface energy and low surface charge trapping coatings, such as fluorocarbon films made from cross-linked carbon di-fluoride monomers or surface monolayers made from fluorocarbon terminated silanol compounds coatings coat the electrode low bulk charge trapping dielectric layers limit charge trapping and other problems and increase device lifetime operation.

Abstract: A fluid circuit includes a membrane having a first side, a second side opposite the first side, and a pore extending from the first side to the second side. The circuit also includes a first channel containing fluid extending along the first side of the membrane and a second channel containing fluid extending along the second side of the membrane and crossing the first channel. The circuit also includes an electrical source in electrical communication with at least one of the first fluid and second fluid for selectively developing an electrical potential between fluid in the first channel and fluid in the second channel. This causes at least one component of fluid to pass through the pore in the membrane from one of the first channel and the second channel to the other of the first channel and the second channel.

Abstract: A flexible mesoscopic heat exchanger is provided by the invention. The heat exchanger of the invention includes uniform microchannels for fluid flow. Separate header and channel layers include microchannels for fluid flow and heat exchange. A layered structure with channels aligned in multiple orientations in the layers permits the use of a flexible material without channel sagging and provides uniform flows. In a preferred embodiment, layers are heat sealed, e.g., by a preferred lamination fabrication process.

Abstract: A flexible mesoscopic heat exchanger is provided by the invention. The heat exchanger of the invention includes uniform microchannels for fluid flow. Separate header and channel layers include microchannels for fluid flow and heat exchange. A layered structure with channels aligned in multiple orientations in the layers permits the use of a flexible material without channel sagging and provides uniform flows. In a preferred embodiment, layers are heat sealed, e.g., by a preferred lamination fabrication process.

Abstract: A tool holder having two distinct phases, a first phase in which the tool is held in an interference fit with sufficient mechanical interaction between the two for the tool to be rotated at high speed and perform its intended purpose on a workpiece, and a second phase in which the tool is sufficiently released from the interference fit to be rapidly removed from the holder (as by an automated apparatus).

Abstract: A flexible mesoscopic heat exchanger is provided by the invention. The heat exchanger of the invention includes uniform microchannels for fluid flow. Separate header and channel layers include microchannels for fluid flow and heat exchange. A layered structure with channels aligned in multiple orientations in the layers permits the use of a flexible material without channel sagging and provides uniform flows. In a preferred embodiment, layers are heat sealed, e.g., by a preferred lamination fabrication process.

Abstract: A fluid circuit includes a membrane having a first side, a second side opposite the first side, and a pore extending from the first side to the second side. The circuit also includes a first channel containing fluid extending along the first side of the membrane and a second channel containing fluid extending along the second side of the membrane and crossing the first channel. The circuit also includes an electrical source in electrical communication with at least one of the first fluid and second fluid for selectively developing an electrical potential between fluid in the first channel and fluid in the second channel. This causes at least one component of fluid to pass through the pore in the membrane from one of the first channel and the second channel to the other of the first channel and the second channel.

Abstract: A thin film integrated conductivity sensor is formed on a suitable surface for measuring the electrical conductivity of a liquid. The surface is preferably an insulator, but may be conducting, if the electrodes are on an insulating surface. A preferred embodiment insulates the electrodes by use of a dielectric layer that is deposited on top of a silicon wafer substrate. A sensor tip is integrated on the top surface of the substrate. In a preferred embodiment, the substrate is fabricated into a sensor shape with a small sharp tip at one end and an opposite larger end for accommodating electrode pads. The larger end might also be used for integration of measurement circuits or accommodating bonding pads. In a preferred embodiment, the tip also accommodates an integrated temperature sensor to enable local temperature measurements.

Abstract: A thin film integrated conductivity sensor is formed on a suitable surface for measuring the electrical conductivity of a liquid. The surface is preferably an insulator, but may be conducting, if the electrodes are on an insulating surface. A preferred embodiment insulates the electrodes by use of a dielectric layer that is deposited on top of a silicon wafer substrate. A sensor tip is integrated on the top surface of the substrate. In a preferred embodiment, the substrate is fabricated into a sensor shape with a small sharp tip at one end and an opposite larger end for accommodating electrode pads. The larger end might also be used for integration of measurement circuits or accommodating bonding pads. In a preferred embodiment, the tip also accommodates an integrated temperature sensor to enable local temperature measurements.

Abstract: A tool holder having two distinct phases, a first phase in which the tool is held in an interference fit with sufficient mechanical interaction between two for the tool to be rotated at high speed and perform its intended purpose on a workpiece, and a second phase in which the tool is sufficiently released from the interference fit to be rapidly removed from the holder (as by an automated apparatus).

Abstract: A microcombustor which is submillimetric in critical dimensions. The invention relies upon solving quenching at submillimetric dimensions. Chemical and thermal quenching are inhibited by selection of materials having a low well depth below approximately 40 kCal/mole. This allows formation of a microcombustor having submillimetric combustion chamber. A preferred microcombustor is formed in a substrate structure. The preferred microcombustor includes a wafer stack of at least three wafers, a central wafer housing a combustion chamber. At least one inlet and outlet are included for the insertion of reactants and exhaust of a flame.