Patents by Inventor Mark Alvey

Mark Alvey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for controlling a plenum output flow geometry
    Publication number: 20050221618
    Abstract: A flow control system disrupts a reactive flow into a process chamber in order to shape the flow geometry issuing into a substrate processing chamber. In one embodiment, gas is injected into a chamber inlet in a direction which disrupts the reactive flow traveling through the chamber inlet. In another embodiment, an insert in the chamber inlet disrupts the reactive flow traveling through the chamber inlet into the process chamber.
    Type: Application
    Filed: March 31, 2004
    Publication date: October 6, 2005
    Inventors: Frederick AmRhein, Lewis Barnett, Mark Alvey