Patents by Inventor Mark Ashley Ford

Mark Ashley Ford has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for sputtering
    Patent number: 8585873
    Abstract: A method of sputtering with sputtering apparatus is for depositing a layer upon a substrate. The apparatus includes a sputter target with a face exposed to the substrate and a magnetron providing a magnetic field that moves relative to the target face. The speed of movement of the field is controlled such that the uniformity of the deposition on the substrate is enhanced. A particular method includes monitoring uniformity verses speed, selecting the speed that gives the preferred uniformity and controlling the field to the selected speed. The selected speed may vary over the life of the target, with increased speeds becoming desirable as the target thins.
    Type: Grant
    Filed: October 12, 2005
    Date of Patent: November 19, 2013
    Assignee: Aviza Technology Limited
    Inventors: Mark Ashley Ford, Rajkumar Jakkaraju
  • Methods of depositing piezoelectric films
    Patent number: 7227292
    Abstract: This invention relates to methods of depositing piezoelectric films such as in part of a stack including depositing a piezoelectric layer, measuring the thickness of the layer and depositing a further film or films such that the combined thickness is substantially equal to the target thickness.
    Type: Grant
    Filed: April 6, 2004
    Date of Patent: June 5, 2007
    Assignee: Aviza Technologies, Inc.
    Inventors: Paul Rich, Mark Ashley Ford
  • Methods of depositing piezoelectric films
    Publication number: 20040200049
    Abstract: This invention relates to methods of depositing piezoelectric films such as in part of a stack including depositing a piezoelectric layer, measuring the thickness of the layer and depositing a further film or films such that the combined thickness is substantially equal to the target thickness.
    Type: Application
    Filed: April 6, 2004
    Publication date: October 14, 2004
    Inventors: Paul Rich, Mark Ashley Ford