Abstract: The invention relates to an improved apparatus and method for the design and manufacture of MEMS anchoring structures for light modulators in order to address the stresses of beams mounted on them.

Abstract: The invention relates to a display apparatus including a first substrate supporting an array of light modulators, a second substrate separated from the first substrate by a gap, a fluid substantially filling the gap, sealing material joining the first substrate to the second substrate, and a bubble trapping region within a space enclosed by the sealing material for substantially constraining a location of a bubble trapped within the gap. In some embodiments, the bubble trapping region extends along a majority of a side of at least one of the substrates. In some embodiments, the fluid has a viscosity less than 70 centipoise.

Abstract: The invention relates to a spatial light modulator including a substrate having a surface and a modulation assembly coupled to the substrate including a modulation element and a compliant beam. The modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam. The invention also relates to a method of manufacturing a spatial light modulator including the steps of forming and releasing a modulation assembly that has a modulation element and a compliant beam formed in a pre-release position to have an intended inherent stress state. As a result of the stress state in the compliant beam, upon release of the compliant beam, the compliant beam bends into a rest position which is different than the pre-release position, where the rest position is based in part on the intended inherent stress state.