Abstract: A method performed by a system including one or more data processing systems. The method includes receiving a plurality of requesting process calls for a target process from one or more requesting processes and identifying dependencies between the requesting process calls. The method includes sending the requesting process call to the target process for execution on multiple threads, including sending thread execution parameters corresponding to the requesting process calls, the thread execution parameters indicating that the requesting process calls can be executed by the target process simultaneously and independently, that the requesting process calls must be processed in a specific order based on the dependencies, or that the requesting process calls are to be executed with shared process objects. The method includes receiving results from the target process. The method includes sending the results to the requesting processes corresponding to the respective requesting process calls.

Abstract: A method performed by a system including one or more data processing systems. The method includes receiving a plurality of requesting process calls for a target process from one or more requesting processes and identifying dependencies between the requesting process calls. The method includes sending the requesting process call to the target process for execution on multiple threads, including sending thread execution parameters corresponding to the requesting process calls, the thread execution parameters indicating that the requesting process calls can be executed by the target process simultaneously and independently, that the requesting process calls must be processed in a specific order based on the dependencies, or that the requesting process calls are to be executed with shared process objects. The method includes receiving results from the target process. The method includes sending the results to the requesting processes corresponding to the respective requesting process calls.

Abstract: A method performed by a system including one or more data processing systems. The method includes receiving a plurality of requesting process calls for a target process from one or more requesting processes, and identifying dependencies between the requesting process calls. The method includes sending the requesting process call to the target process for execution on multiple threads, including sending thread execution parameters corresponding to the requesting process calls. The method includes receiving results, corresponding to the requesting process calls, from the target process. The method includes sending the results to the requesting processes corresponding to the respective requesting process calls.

Abstract: A method performed by a system including one or more data processing systems. The method includes receiving a plurality of requesting process calls for a target process from one or more requesting processes, and identifying dependencies between the requesting process calls. The method includes sending the requesting process call to the target process for execution on multiple threads, including sending thread execution parameters corresponding to the requesting process calls. The method includes receiving results, corresponding to the requesting process calls, from the target process. The method includes sending the results to the requesting processes corresponding to the respective requesting process calls.

Abstract: Increasing the number of successive pulses of oxidant before applying pulses of metal precursor may improve the quality of the resulting metal or rare earth oxide films. These metal or rare earth oxide films may be utilized for high dielectric constant gate dielectrics. In addition, pulsing the oxidant during the pre-stabilization period may be advantageous. Also, using more pulses of oxidant than the pulses of precursor may reduce chlorine concentration in the resulting films.