Abstract: A method for forming spacers of specific dimensions on a polysilicon gate electrode protects the sidewalls of the polysilicon gate electrode during selective epitaxial growth. The spacers, whether asymmetric or symmetric, are precisely defined by using the same specific exposure tool, such as a 193 nm wavelength step and scan exposure tool, and the same pattern reticle, in both the defining of the polysilicon gate electrode pattern and the pattern spacer, while employing tight alignment specifications.

Abstract: A method of forming a shallow trench isolation (STI) region in a silicon substrate creates an STI region that extends above a top surface of the silicon substrate. A planarizing dielectric layer is formed on the substrate and extends above the field oxide regions. The planarizing dielectric layer is removed by chemical mechanical polishing or blanket etch back, for example, as well as those portions of the field oxide regions that extend above the top surface of the substrate and the active regions. The step height is thereby eliminated or significantly reduced.

Abstract: A strained silicon semiconductor arrangement with a shallow trench isolation (STI) structure has a strained silicon (Si) layer formed on a silicon germanium (SiGe) layer. A trench extends through the Si layer into the SiGe layer, and sidewall spacers are employed that cover the entirety of the sidewalls within the trench in the SiGe layer. Following STI fill, polish and nitride stripping process steps, further processing can be performed without concern of the SiGe layer being exposed to a silicide formation process.