Patents by Inventor Mark Cawein

Mark Cawein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-beam electronics scan
    Patent number: 12014895
    Abstract: A multi-beam electronics scanning system using swathing. The system includes an electron emitter source configured to emit an illumination beam. The illumination beam is split into multiple electron beams by a beam splitter lens array. The system also includes an electronic deflection system configured to deflect each of the electron beams in a plurality of directions, including a first direction, along two different axes. Last, a swathing stage is used to move a sample with a constant velocity in a second direction that is parallel to the first direction.
    Type: Grant
    Filed: December 1, 2021
    Date of Patent: June 18, 2024
    Assignee: KLA Corporation
    Inventors: Tomas Plettner, Doug Larson, Mark Cawein, Jason W. Huang
  • MULTI-BEAM ELECTRONICS SCAN
    Publication number: 20220199352
    Abstract: A multi-beam electronics scanning system using swathing. The system includes an electron emitter source configured to emit an illumination beam. The illumination beam is split into multiple electron beams by a beam splitter lens array. The system also includes an electronic deflection system configured to deflect each of the electron beams in a plurality of directions, including a first direction, along two different axes. Last, a swathing stage is used to move a sample with a constant velocity in a second direction that is parallel to the first direction.
    Type: Application
    Filed: December 1, 2021
    Publication date: June 23, 2022
    Applicant: KLA Corporation
    Inventors: Tomas Plettner, Doug Larson, Mark Cawein, Jason W. Huang