Patents by Inventor Mark Christian MUELLER

Mark Christian MUELLER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of dicing thin semiconductor substrates
    Patent number: 9312178
    Abstract: A method of dicing a plurality of integrated devices included in a semiconductor substrate using laser energy comprises the steps of directing a first laser beam onto a cutting line along the substrate to ablate a portion of the substrate located along the cutting line to be diced, the portion of the substrate that is ablated forming a recast material adjacent to the cutting line of the substrate that has been diced. A second laser beam is directed onto another portion of the substrate adjacent to the cutting line to conduct heat processing of the recast material formed adjacent to the cutting line.
    Type: Grant
    Filed: June 25, 2015
    Date of Patent: April 12, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Karel Maykel Richard Van Der Stam, Guido Martinus Henricus Knippels, Mark Christian Mueller, Juergen Roland Betz
  • METHOD OF DICING THIN SEMICONDUCTOR SUBSTRATES
    Publication number: 20160013105
    Abstract: A method of dicing a plurality of integrated devices included in a semiconductor substrate using laser energy comprises the steps of directing a first laser beam onto a cutting line along the substrate to ablate a portion of the substrate located along the cutting line to be diced, the portion of the substrate that is ablated forming a recast material adjacent to the cutting line of the substrate that has been diced. A second laser beam is directed onto another portion of the substrate adjacent to the cutting line to conduct heat processing of the recast material formed adjacent to the cutting line.
    Type: Application
    Filed: June 25, 2015
    Publication date: January 14, 2016
    Inventors: Karel Maykel Richard VAN DER STAM, Guido Martinus Henricus KNIPPELS, Mark Christian MUELLER, Juergen Roland BETZ