Abstract: In one aspect, an apparatus is provided that includes (1) an interface adapted to analyze information about an electronic device manufacturing system that produces an effluent having an undesirable material, and provide information about the effluent, and (2) an abatement system adapted to receive information about the effluent, receive the effluent, and attenuate the undesirable material. Numerous other aspects are provided.

Abstract: In one aspect of the invention, a method for the improved operation of an electronic device manufacturing system is provided. The method includes providing information to an interface coupled to an electronic device manufacturing system having parameters, processing the information to predict a first parameter, and providing an instruction related to at least a second parameter of the electronic device manufacturing system wherein the instruction is based on the predicted first parameter. Numerous other aspects are provided.

Abstract: In one aspect, improved methods and apparatus for pressure control in an electronic device manufacturing system are provided. The method includes acquiring information related to a current state of the electronic device manufacturing system, determining a desired value of a first parameter of the electronic device manufacturing system based on the acquired information and adjusting at least one parameter of a pump to obtain the desired value of the first parameter of the electronic device manufacturing system.

Abstract: A system and method for detecting damage to a structure is provided. The system includes a voltage source and at least one capacitor formed as a layer within the structure and responsive to the voltage source. The system also includes at least one sensor responsive to the capacitor to sense a voltage of the capacitor. A controller responsive to the sensor determines if damage to the structure has occurred based on the variance of the voltage of the capacitor from a known reference value. A method for sensing damage to a structure involves providing a plurality of capacitors and a controller, and coupling the capacitors to at least one surface of the structure. A voltage of the capacitors is sensed using the controller, and the controller calculates a change in the voltage of the capacitors. The method can include signaling a display system if a change in the voltage occurs.

Abstract: In a first aspect, a first abatement apparatus is provided. The first abatement apparatus includes (1) an oxidation unit adapted to receive an effluent stream from a semiconductor device manufacturing chamber; (2) a first water scrubber unit adapted to receive the effluent stream from the oxidation unit; and (3) a catalysis unit adapted to receive the effluent stream from the first water scrubber unit. Numerous other aspects are provided.

Abstract: Systems and methods for processing echo signals in a Doppler ultrasound system from a region of interest. An ultrasound beam is electronically steered to deliver ultrasound to and receive echo signals from a plurality of sample locations in the region of interest. The echo signals for each sample location are processed to extract Doppler shift signals and Doppler shift data representing the Doppler shift signals are generated. The Doppler shift data accumulated for the sample locations can be used to detect the presence of blood flow in the region of interest, and identify the location in the region of interest at which the presence of blood flow is detected. The blood flow can be tracked by updating the location of the detected blood flow in the region of interest. The blood flow can be further monitored by combining the locating and tracking functionality with an m-mode ultrasound image.

Abstract: A mobile platform is provided which has at least one component having an array of distributed piezoelectric transmitters and an associated array of distributed receivers. The receivers are configured to receive ultrasonic transmissions from the transmitters. Data from the receivers is stored in memory and processed through an algebraic reconstruction tomography algorithm which forms an image of the defect within the component. An algorithm is used to determine the position and size of the defect.

Abstract: A mobile platform is provided which has at least one component having an array of distributed piezoelectric transmitters and an associated array of distributed receivers. The receivers are configured to receive ultrasonic transmissions from the transmitters. Data from the receivers is stored in memory and processed through an algebraic reconstruction tomography algorithm which forms an image of the defect within the component. An algorithm is used to determine the position and size of the defect.