Patents by Inventor Mark D. Bouffard

Mark D. Bouffard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PECVD process for forming BPSG with low flow temperature
    Patent number: 5409743
    Abstract: A method of forming a BPSG film in a PECVD reactor with ratios of P.sub.2 O.sub.3 /P.sub.2 O.sub.5 such that the film flows at low temperature in a non-oxidizing ambient and produces a reduced number of particulates. The method permits tailoring of the wall angle of a BPSG film by controlling the P.sub.2 O.sub.3 /P.sub.2 O.sub.5 ratio.
    Type: Grant
    Filed: May 14, 1993
    Date of Patent: April 25, 1995
    Assignee: International Business Machines Corporation
    Inventors: Mark D. Bouffard, William J. King, Cheryl M. Martin