Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers, a memory opening vertically extending through the alternating stack, a memory opening fill structure located in memory opening and including a vertical stack of memory elements located at levels of the electrically conductive layers and a vertical semiconductor channel, a layer contact via structure contacting a first electrically conductive layer within a first subset of the electrically conductive layers and vertically extending through a second subset of the electrically conductive layers that overlies the first subset, and a support pillar structure located under a bottom surface of the layer contact via structure.

Abstract: A memory device includes a first alternating stack including first insulating layers and first electrically conductive layers that are interlaced along a vertical direction, where a first stepped cavity located inside the first alternating stack includes a first stepped bottom surface containing horizontally-extending surface segments of the first electrically conductive layers, a memory opening vertically extending through each layer within the first alternating stack, a memory opening fill structure located in the memory opening and including a vertical stack of memory elements, a first insulating spacer contacting sidewalls of the first stepped cavity, and a first electrically conductive strip including a first horizontally-extending bottom strip segment contacting one of the first electrically conductive layers, a first horizontally-extending top strip segment that overlies a topmost layer within the first alternating stack, and a first vertically-extending strip segment connecting the first horizontally-

Abstract: A three-dimensional memory device includes a memory die bonded to a logic die. The memory die includes an alternating stack of insulating layers and electrically conductive layers each of which includes a horizontally-extending portion and a slanted portion that extends at a non-zero and non-orthogonal angle relative to the horizontally-extending portion, where each slanted portion has a horizontal end surface located within a first horizontal plane, memory openings vertically extending through the alternating stack, memory opening fill structures located in the memory openings, and layer contact via structures having a respective end surface that contacts a respective one of the end surfaces of the slanted portions of the electrically conductive layers within the first horizontal plane.

Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers, a memory opening vertically extending through the alternating stack, a memory opening fill structure located in memory opening and including a vertical stack of memory elements located at levels of the electrically conductive layers and a vertical semiconductor channel, a layer contact via structure contacting a first electrically conductive layer within a first subset of the electrically conductive layers and vertically extending through a second subset of the electrically conductive layers that overlies the first subset, and a support pillar structure located under a bottom surface of the layer contact via structure.

Abstract: A memory device includes a first alternating stack including first insulating layers and first electrically conductive layers that are interlaced along a vertical direction, where a first stepped cavity located inside the first alternating stack includes a first stepped bottom surface containing horizontally-extending surface segments of the first electrically conductive layers, a memory opening vertically extending through each layer within the first alternating stack, a memory opening fill structure located in the memory opening and including a vertical stack of memory elements, a first insulating spacer contacting sidewalls of the first stepped cavity, and a first electrically conductive strip including a first horizontally-extending bottom strip segment contacting one of the first electrically conductive layers, a first horizontally-extending top strip segment that overlies a topmost layer within the first alternating stack, and a first vertically-extending strip segment connecting the first horizontally-

Abstract: A memory device includes an alternating stack of insulating layers and electrically conductive layers, memory openings vertically extending through the alternating stack, memory opening fill structures located in the memory openings and including a respective memory film and a respective vertical semiconductor channel, contact wells vertically extending through a respective subset of layers of the alternating stack that includes a topmost insulating layer of the insulating layers, dielectric fill structures located in the contact wells, and an array of contact via structures vertically extending through the respective dielectric fill structure in each of the contact wells and contacting a top surface of a respective electrically conductive layer within a subset of the electrically conductive layers, the subset of the electrically conductive layers including a plurality of electrically conductive layers that are vertically spaced apart.

Abstract: A rolled-up electromagnetic component for on-chip applications comprises: a multilayer sheet in a rolled configuration comprising at least one turn about a longitudinal axis; a core defined by a first turn of the rolled configuration; and a soft magnetic material disposed within the core, where the multilayer sheet comprises a conductive pattern layer on a strain-relieved layer. A method of making a rolled-up electromagnetic component for on-chip applications includes forming a rolled-up device comprising: a multilayer sheet in a rolled configuration having at least one turn about a longitudinal axis, where the multilayer sheet comprises a conductive pattern layer on a strain-relieved layer; and a core defined by a first turn of the rolled configuration. The method further includes introducing a soft magnetic material into the core.

Abstract: A rolled-up electromagnetic component for on-chip applications comprises: a multilayer sheet in a rolled configuration comprising at least one turn about a longitudinal axis; a core defined by a first turn of the rolled configuration; and a soft magnetic material disposed within the core, where the multilayer sheet comprises a conductive pattern layer on a strain-relieved layer. A method of making a rolled-up electromagnetic component for on-chip applications includes forming a rolled-up device comprising: a multilayer sheet in a rolled configuration having at least one turn about a longitudinal axis, where the multilayer sheet comprises a conductive pattern layer on a strain-relieved layer; and a core defined by a first turn of the rolled configuration. The method further includes introducing a soft magnetic material into the core.