Abstract: Methods and apparatus for lamp housing crack detection are provided herein. For example, a method associated with a process chamber having a lamp housing comprises sequentially processing a plurality of substrates in the process chamber, during processing of the plurality of substrates, collecting lamp housing data indicative of a fluid leak in the lamp housing from a sensor operably connected to the lamp housing of the process chamber, determining from the lamp housing data whether lamp housing crack is present, and responsive to determining lamp housing crack is present, at least one of triggering an alert or stopping processing of the process chamber.

Abstract: A system and method is provided for controlling building fluid distribution. The system may cause a variable air volume building ventilation system to operate at different combinations of different fan speeds for different damper opening configurations. For each different combination of fan speed and damper opening configuration, the system may: determine a static pressure measurement for each terminal unit based on a flow measurement determined by terminal box controllers using a pressure sensor; and determine a static pressure measurement for the supply fan from a pressure sensor mounted in a ventilation duct downstream of the at least one supply fan and upstream of each terminal unit. The system may also determine and store in each terminal box controller, a friction loss coefficient based on the static pressure measurements for the supply fan and the terminal units.

Abstract: There is described an epicyclic gear system and method of a flow control actuator for providing selectable torque and speed ranges. The epicyclic gear system comprises an input shaft, a gear engagement system, and an output shaft. The input shaft is configured to receive an input rotational motion. The gear engagement system is configured to receive a gear ratio command from a clutch mechanism and restrict movement of one or more gears of multiple planetary gears in response to the gear ratio command. The output shaft is configured to provide an output rotational motion based on the input rotational motion at the input shaft. The output rotational motion is different from the input rotational motion in response to restricting movement of one or more gears of the planetary gears.

Abstract: A system and method is provided for controlling building fluid distribution. The system may cause a variable air volume building ventilation system to operate at different combinations of different fan speeds for different damper opening configurations. For each different combination of fan speed and damper opening configuration, the system may: determine a static pressure measurement for each terminal unit based on a flow measurement determined by terminal box controllers using a pressure sensor; and determine a static pressure measurement for the supply fan from a pressure sensor mounted in a ventilation duct downstream of the at least one supply fan and upstream of each terminal unit. The system may also determine and store in each terminal box controller, a friction loss coefficient based on the static pressure measurements for the supply fan and the terminal units.

Abstract: A semiconductor storage device including a tip electrode, a media electrode and a storage media. The storage media has a storage area configurable to be in one of a plurality of structural states to represent information stored at the storage area, by passing a current through the storage area between the tip electrode and media electrode.