Patents by Inventor Mark Durcan

Mark Durcan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7619672
    Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. Also disclosed are methods for forming the retrograde well.
    Type: Grant
    Filed: January 22, 2004
    Date of Patent: November 17, 2009
    Assignee: Aptina Imaging Corporation
    Inventors: Howard E. Rhodes, Mark Durcan
  • Patent number: 7365384
    Abstract: A memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.
    Type: Grant
    Filed: October 27, 2006
    Date of Patent: April 29, 2008
    Assignee: Micron Technology, Inc.
    Inventors: Luan C. Tran, Mark Durcan, Howard C. Kirsch
  • Publication number: 20070040200
    Abstract: A memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.
    Type: Application
    Filed: October 27, 2006
    Publication date: February 22, 2007
    Inventors: Luan Tran, Mark Durcan, Howard Kirsch
  • Patent number: 7170124
    Abstract: A memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.
    Type: Grant
    Filed: October 19, 2004
    Date of Patent: January 30, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Luan C. Tran, Mark Durcan, Howard C. Kirsch
  • Publication number: 20060249723
    Abstract: A method of manufacturing semiconductor devices using an improved chemical mechanical planarization process for the planarization of the surfaces of the wafer on which the semiconductor devices are formed. The improved chemical mechanical planarization process includes the formation of a flat planar surface from a deformable coating on the surface of the wafer filling in between the surface irregularities prior to the planarization of the surface through a chemical mechanical planarization process.
    Type: Application
    Filed: July 11, 2006
    Publication date: November 9, 2006
    Inventors: Trung Doan, Guy Blalock, Mark Durcan, Scott Meikle
  • Patent number: 6995059
    Abstract: Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions are described. In one embodiment, a capacitor storage node is formed having an uppermost surface and an overlying insulative material over the uppermost surface. Subsequently, a capacitor dielectric functioning region is formed discrete from the overlying insulative material operably proximate at least a portion of the capacitor storage node. A cell electrode layer is formed over the capacitor dielectric functioning region and the overlying insulative material.
    Type: Grant
    Filed: July 25, 2003
    Date of Patent: February 7, 2006
    Assignee: Micron Technology, Inc.
    Inventors: Tyler A. Lowrey, Luan C. Tran, Alan R. Reinberg, Mark Durcan
  • Publication number: 20050078534
    Abstract: A memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.
    Type: Application
    Filed: October 19, 2004
    Publication date: April 14, 2005
    Inventors: Luan Tran, Mark Durcan, Howard Kirsch
  • Patent number: 6858460
    Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. Also disclosed are methods for forming the retrograde well.
    Type: Grant
    Filed: November 12, 2002
    Date of Patent: February 22, 2005
    Assignee: Micron Technology, Inc.
    Inventors: Howard E. Rhodes, Mark Durcan
  • Publication number: 20040209475
    Abstract: A method of manufacturing semiconductor devices using an improved chemical mechanical planarization process for the planarization of the surfaces of the wafer on which the semiconductor devices are formed. The improved chemical mechanical planarization process includes the formation of a flat planar surface from a deformable coating on the surface of the wafer filling in between the surface irregularities prior to the planarization of the surface through a chemical mechanical planarization process.
    Type: Application
    Filed: May 4, 2004
    Publication date: October 21, 2004
    Inventors: Trung T. Doan, Guy T. Blalock, Mark Durcan, Scott G. Meikle
  • Patent number: 6806137
    Abstract: A memory device such as a 6F2 memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.
    Type: Grant
    Filed: November 11, 2003
    Date of Patent: October 19, 2004
    Assignee: Micron Technology, Inc.
    Inventors: Luan C. Tran, Mark Durcan, Howard C. Kirsch
  • Patent number: 6787819
    Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. Also disclosed are methods for forming the retrograde well.
    Type: Grant
    Filed: November 18, 2002
    Date of Patent: September 7, 2004
    Assignee: Micron Technology, Inc.
    Inventors: Howard E. Rhodes, Mark Durcan
  • Publication number: 20040150736
    Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. Also disclosed are methods for forming the retrograde well.
    Type: Application
    Filed: January 22, 2004
    Publication date: August 5, 2004
    Inventors: Howard E. Rhodes, Mark Durcan
  • Patent number: 6743724
    Abstract: A method of manufacturing semiconductor devices using an improved chemical mechanical planarization process for the planarization of the surfaces of the wafer on which the semiconductor devices are formed. The improved chemical mechanical planarization process includes the formation of a flat planar surface from a deformable coating on the surface of the wafer filling in between the surface irregularities prior to the planarization of the surface through a chemical mechanical planarization process.
    Type: Grant
    Filed: April 11, 2001
    Date of Patent: June 1, 2004
    Assignee: Micron Technology, Inc.
    Inventors: Trung T. Doan, Guy T. Blalock, Mark Durcan, Scott G. Meikle
  • Publication number: 20040094789
    Abstract: A memory device such as a 6F2 memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.
    Type: Application
    Filed: November 11, 2003
    Publication date: May 20, 2004
    Inventors: Luan C. Tran, Mark Durcan, Howard C. Kirsch
  • Patent number: 6734482
    Abstract: A memory device such as a 6F2 memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.
    Type: Grant
    Filed: November 15, 2002
    Date of Patent: May 11, 2004
    Assignee: Micron Technology, Inc.
    Inventors: Luan C. Tran, Mark Durcan, Howard C. Kirsch
  • Patent number: 6686220
    Abstract: A retrograde and periphery well structure for a CMOS imager is disclosed which improves the quantum efficiency and signal-to-noise ratio of the photosensing portion imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. The periphery well contains peripheral logic circuitry for the imager. By providing retrograde and peripheral wells, circuitry in each can be optimized. Also disclosed are methods for forming the retrograde and peripheral well.
    Type: Grant
    Filed: June 27, 2002
    Date of Patent: February 3, 2004
    Assignee: Micron Technology, Inc.
    Inventors: Howard E. Rhodes, Mark Durcan
  • Publication number: 20030180982
    Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diff-using up into the photosensor. Also disclosed are methods for forming the retrograde well.
    Type: Application
    Filed: November 12, 2002
    Publication date: September 25, 2003
    Inventors: Howard E. Rhodes, Mark Durcan
  • Publication number: 20030173572
    Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. Also disclosed are methods for forming the retrograde well.
    Type: Application
    Filed: November 18, 2002
    Publication date: September 18, 2003
    Inventors: Howard E. Rhodes, Mark Durcan
  • Patent number: 6599800
    Abstract: Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions are described. In one embodiment, a capacitor storage node is formed having an uppermost surface and an overlying insulative material over the uppermost surface. Subsequently, a capacitor dielectric functioning region is formed discrete from the overlying insulative material operably proximate at least a portion of the capacitor storage node. A cell electrode layer is formed over the capacitor dielectric functioning region and the overlying insulative material.
    Type: Grant
    Filed: September 14, 2001
    Date of Patent: July 29, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Tyler A. Lowrey, Luan C. Tran, Alan R. Reinberg, Mark Durcan
  • Patent number: 6483129
    Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. Also disclosed are methods for forming the retrograde well.
    Type: Grant
    Filed: August 1, 2001
    Date of Patent: November 19, 2002
    Assignee: Micron Technology, Inc.
    Inventors: Howard E. Rhodes, Mark Durcan