Patents by Inventor Mark Durcan
Mark Durcan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7619672Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. Also disclosed are methods for forming the retrograde well.Type: GrantFiled: January 22, 2004Date of Patent: November 17, 2009Assignee: Aptina Imaging CorporationInventors: Howard E. Rhodes, Mark Durcan
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Patent number: 7365384Abstract: A memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.Type: GrantFiled: October 27, 2006Date of Patent: April 29, 2008Assignee: Micron Technology, Inc.Inventors: Luan C. Tran, Mark Durcan, Howard C. Kirsch
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Publication number: 20070040200Abstract: A memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.Type: ApplicationFiled: October 27, 2006Publication date: February 22, 2007Inventors: Luan Tran, Mark Durcan, Howard Kirsch
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Patent number: 7170124Abstract: A memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.Type: GrantFiled: October 19, 2004Date of Patent: January 30, 2007Assignee: Micron Technology, Inc.Inventors: Luan C. Tran, Mark Durcan, Howard C. Kirsch
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Publication number: 20060249723Abstract: A method of manufacturing semiconductor devices using an improved chemical mechanical planarization process for the planarization of the surfaces of the wafer on which the semiconductor devices are formed. The improved chemical mechanical planarization process includes the formation of a flat planar surface from a deformable coating on the surface of the wafer filling in between the surface irregularities prior to the planarization of the surface through a chemical mechanical planarization process.Type: ApplicationFiled: July 11, 2006Publication date: November 9, 2006Inventors: Trung Doan, Guy Blalock, Mark Durcan, Scott Meikle
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Patent number: 6995059Abstract: Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions are described. In one embodiment, a capacitor storage node is formed having an uppermost surface and an overlying insulative material over the uppermost surface. Subsequently, a capacitor dielectric functioning region is formed discrete from the overlying insulative material operably proximate at least a portion of the capacitor storage node. A cell electrode layer is formed over the capacitor dielectric functioning region and the overlying insulative material.Type: GrantFiled: July 25, 2003Date of Patent: February 7, 2006Assignee: Micron Technology, Inc.Inventors: Tyler A. Lowrey, Luan C. Tran, Alan R. Reinberg, Mark Durcan
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Publication number: 20050078534Abstract: A memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.Type: ApplicationFiled: October 19, 2004Publication date: April 14, 2005Inventors: Luan Tran, Mark Durcan, Howard Kirsch
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Patent number: 6858460Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. Also disclosed are methods for forming the retrograde well.Type: GrantFiled: November 12, 2002Date of Patent: February 22, 2005Assignee: Micron Technology, Inc.Inventors: Howard E. Rhodes, Mark Durcan
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Publication number: 20040209475Abstract: A method of manufacturing semiconductor devices using an improved chemical mechanical planarization process for the planarization of the surfaces of the wafer on which the semiconductor devices are formed. The improved chemical mechanical planarization process includes the formation of a flat planar surface from a deformable coating on the surface of the wafer filling in between the surface irregularities prior to the planarization of the surface through a chemical mechanical planarization process.Type: ApplicationFiled: May 4, 2004Publication date: October 21, 2004Inventors: Trung T. Doan, Guy T. Blalock, Mark Durcan, Scott G. Meikle
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Patent number: 6806137Abstract: A memory device such as a 6F2 memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.Type: GrantFiled: November 11, 2003Date of Patent: October 19, 2004Assignee: Micron Technology, Inc.Inventors: Luan C. Tran, Mark Durcan, Howard C. Kirsch
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Patent number: 6787819Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. Also disclosed are methods for forming the retrograde well.Type: GrantFiled: November 18, 2002Date of Patent: September 7, 2004Assignee: Micron Technology, Inc.Inventors: Howard E. Rhodes, Mark Durcan
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Publication number: 20040150736Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. Also disclosed are methods for forming the retrograde well.Type: ApplicationFiled: January 22, 2004Publication date: August 5, 2004Inventors: Howard E. Rhodes, Mark Durcan
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Patent number: 6743724Abstract: A method of manufacturing semiconductor devices using an improved chemical mechanical planarization process for the planarization of the surfaces of the wafer on which the semiconductor devices are formed. The improved chemical mechanical planarization process includes the formation of a flat planar surface from a deformable coating on the surface of the wafer filling in between the surface irregularities prior to the planarization of the surface through a chemical mechanical planarization process.Type: GrantFiled: April 11, 2001Date of Patent: June 1, 2004Assignee: Micron Technology, Inc.Inventors: Trung T. Doan, Guy T. Blalock, Mark Durcan, Scott G. Meikle
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Publication number: 20040094789Abstract: A memory device such as a 6F2 memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.Type: ApplicationFiled: November 11, 2003Publication date: May 20, 2004Inventors: Luan C. Tran, Mark Durcan, Howard C. Kirsch
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Patent number: 6734482Abstract: A memory device such as a 6F2 memory device includes isolation trenches that are formed generally parallel to and along associated strips of active area. A conductive bit line is recessed within each isolation trench such that the uppermost surface of the bit line is recessed below the uppermost surface of the base substrate. A bit line contact strap electrically couples the bit line to the active area both along a vertical dimension of the bit line strap and along a horizontal dimension across the uppermost surface of the base substrate.Type: GrantFiled: November 15, 2002Date of Patent: May 11, 2004Assignee: Micron Technology, Inc.Inventors: Luan C. Tran, Mark Durcan, Howard C. Kirsch
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Patent number: 6686220Abstract: A retrograde and periphery well structure for a CMOS imager is disclosed which improves the quantum efficiency and signal-to-noise ratio of the photosensing portion imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. The periphery well contains peripheral logic circuitry for the imager. By providing retrograde and peripheral wells, circuitry in each can be optimized. Also disclosed are methods for forming the retrograde and peripheral well.Type: GrantFiled: June 27, 2002Date of Patent: February 3, 2004Assignee: Micron Technology, Inc.Inventors: Howard E. Rhodes, Mark Durcan
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Publication number: 20030180982Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diff-using up into the photosensor. Also disclosed are methods for forming the retrograde well.Type: ApplicationFiled: November 12, 2002Publication date: September 25, 2003Inventors: Howard E. Rhodes, Mark Durcan
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Publication number: 20030173572Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. Also disclosed are methods for forming the retrograde well.Type: ApplicationFiled: November 18, 2002Publication date: September 18, 2003Inventors: Howard E. Rhodes, Mark Durcan
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Patent number: 6599800Abstract: Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions are described. In one embodiment, a capacitor storage node is formed having an uppermost surface and an overlying insulative material over the uppermost surface. Subsequently, a capacitor dielectric functioning region is formed discrete from the overlying insulative material operably proximate at least a portion of the capacitor storage node. A cell electrode layer is formed over the capacitor dielectric functioning region and the overlying insulative material.Type: GrantFiled: September 14, 2001Date of Patent: July 29, 2003Assignee: Micron Technology, Inc.Inventors: Tyler A. Lowrey, Luan C. Tran, Alan R. Reinberg, Mark Durcan
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Patent number: 6483129Abstract: A retrograde well structure for a CMOS imager that improves the quantum efficiency and signal-to-noise ratio of the imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. Also disclosed are methods for forming the retrograde well.Type: GrantFiled: August 1, 2001Date of Patent: November 19, 2002Assignee: Micron Technology, Inc.Inventors: Howard E. Rhodes, Mark Durcan