Abstract: Miniaturized linear electrostatic motor comprising a plurality of parallel stators and a flexible rotor disposed between adjacent stators. The stators may be fabricated by depositing a plurality of conductive electrodes on each facing surface of the stator or the electrodes may alternatively be placed on the flexible rotor element. The electrodes are selectively energized by a commutating circuit in a manner to effect movement of the rotor relative to the stator in a perpendicular to parallel motion. The electrostatic motor is particularly suitable for fabrication using photo-lithographic techniques and the formation of multi-layered, concatenated motor structures.