Patents by Inventor Mark E. Culp

Mark E. Culp has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Advanced process control of thermal oxidation processes, and systems for accomplishing same
    Patent number: 7217578
    Abstract: The present invention is generally directed to various advanced process control methodologies for thermal oxidation processes, and various systems for accomplishing same. In one illustrative embodiment, the method comprises measuring an ambient pressure of an environment external to an oxidation chamber, determining a correction factor based upon at least the measured ambient pressure, determining at least one parameter of a thermal oxidation process to be performed in the oxidation chamber based upon the determined correction factor, and performing the thermal oxidation process comprised of the determined parameter on at least one substrate positioned in the oxidation chamber.
    Type: Grant
    Filed: August 2, 2004
    Date of Patent: May 15, 2007
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Michael J. McBride, Jesse C. Ramos, Mark E. Culp, Matthew Ryskoski, Pirainder S. Lall
  • Method and apparatus for controlling byproduct induced defect density
    Patent number: 6263590
    Abstract: A method and apparatus for reducing byproduct induced defects in a processing tool is provided. A purge gas is introduced into a vessel of the processing tool. The vessel is heated to a temperature above a vaporization temperature of the byproduct. The temperature is maintained for a predetermined period of time. The vessel is purged to remove at least a portion of the byproduct.
    Type: Grant
    Filed: July 12, 1999
    Date of Patent: July 24, 2001
    Assignee: Advanced Micro Devices, Inc.
    Inventors: William A. Whigham, Mark E. Culp, Allan T. Nelson