Patents by Inventor MARK E. GAYDOS

MARK E. GAYDOS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9334562
    Abstract: A sputtering target that includes at least two consolidated blocks, each block including an alloy including molybdenum in an amount greater than about 30 percent by weight and at least one additional alloying ingredient; and a joint between the at least two consolidated blocks, the joint being free of any microstructure due to an added bonding agent (e.g., powder, foil or otherwise), and being essentially free of any visible joint line the target that is greater than about 200 ?m width (e.g., less than about 50 ?m width). A process for making the target includes hot isostatically pressing, below a temperature of 1080° C., consolidated perform blocks that may be surface prepared (e.g., roughened to a predetermined roughness value) prior to pressing.
    Type: Grant
    Filed: May 9, 2012
    Date of Patent: May 10, 2016
    Assignee: H.C. STARCK INC.
    Inventors: Gary Alan Rozak, Mark E. Gaydos
  • Publication number: 20150332903
    Abstract: The invention is directed at sputter targets including 50 atomic % or more molybdenum, a second metal element of titanium, and a third metal element of chromium or tantalum, and deposited films prepared by the sputter targets. In a preferred aspect of the invention, the sputter target includes a phase that is rich in molybdenum, a phase that is rich in titanium, and a phase that is rich in the third metal element.
    Type: Application
    Filed: July 30, 2015
    Publication date: November 19, 2015
    Inventors: Gary Alan Rozak, Mark E. Gaydos, Patrick Alan Hogan, Shuwei Sun
  • Patent number: 9150955
    Abstract: The invention relates to sputter targets and methods for depositing a layer from a sputter target. The method preferably includes the steps of; placing a sputter target in a vacuum chamber; placing a substrate having a substrate surface in the vacuum chamber; reducing the pressure in the vacuum chamber to about 100 Torr or less; removing atoms from the surface of the sputter target white the sputter target is in the vacuum chamber (e.g., using a magnetic field and/or an electric field). The deposited layer preferably includes a molybdenum containing alloy including about 50 atomic percent or more molybdenum, 0.1 to 45 atomic percent titanium; and 0.1 to 40 atomic percent of a third metal element that is tantalum or chromium.
    Type: Grant
    Filed: April 5, 2013
    Date of Patent: October 6, 2015
    Assignee: H.C. STARCK INC.
    Inventors: Gary Alan Rozak, Mark E. Gaydos, Patrick Alan Hogan, Shuwei Sun
  • Publication number: 20150197845
    Abstract: The invention is directed at sputter targets including 50 atomic % or more molybdenum, a second metal element of niobium or vanadium, and a third metal element selected from the group consisting of titanium, chromium, niobium, vanadium, and tantalum, wherein the third metal element is different from the second metal element, and deposited films prepared by the sputter targets. In a preferred aspect of the invention, the sputter target includes a phase that is rich in molybdenum, a phase that is rich in the second metal element, and a phase that is rich in the third metal element.
    Type: Application
    Filed: March 26, 2015
    Publication date: July 16, 2015
    Inventors: Gary Alan Rozak, Mark E. Gaydos, Patrick Alan Hogan, Shuwei Sun
  • Patent number: 9017762
    Abstract: The invention relates to sputter targets and methods for depositing a layer from a sputter target. The method preferably includes the steps of: placing a sputter target in a vacuum chamber; placing a substrate having a substrate surface in the vacuum chamber; reducing the pressure in the vacuum chamber to about 100 Torr or less; removing atoms from the surface of the sputter target while the sputter target is in the vacuum chamber (e.g., using a magnetic field and/or an electric field). The deposited layer preferably is a molybdenum containing alloy including about 50 atomic percent or more molybdenum, 0.5 to 45 atomic percent of a second metal element selected from the group consisting of niobium and vanadium; and 0.5 to 45 atomic percent of a third metal element selected from the group consisting of tantalum, chromium, vanadium, niobium, and titanium.
    Type: Grant
    Filed: April 4, 2013
    Date of Patent: April 28, 2015
    Assignee: H.C. Starck, Inc.
    Inventors: Gary Alan Rozak, Mark E. Gaydos, Patrick Alan Hogan, Shuwei Sun
  • Patent number: 8911528
    Abstract: Molybdenum titanium sputter targets are provided. In one aspect, the targets are substantially free of the ?(Ti, Mo) alloy phase. In another aspect, the targets are substantially comprised of single phase ?(Ti, Mo) alloy. In both aspects, particulate emission during sputtering is reduced. Methods of preparing the targets, methods of bonding targets together to produce large area sputter targets, and films produced by the targets, are also provided.
    Type: Grant
    Filed: November 2, 2010
    Date of Patent: December 16, 2014
    Assignee: H.C. Starck Inc.
    Inventors: Mark E. Gaydos, Prabhat Kumar, Steve Miller, Norman C. Mills, Gary Rozak, Rong-Chein Richard Wu
  • Patent number: 8449818
    Abstract: The invention is directed at sputter targets including 50 atomic % or more molybdenum, a second metal element of titanium, and a third metal element of chromium or tantalum, and deposited films prepared by the sputter targets. In a preferred aspect of the invention, the sputter target includes a phase that is rich in molybdenum, a phase that is rich in titanium, and a phase that is rich in the third metal element.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: May 28, 2013
    Assignee: H. C. Starck, Inc.
    Inventors: Gary Alan Rozak, Mark E. Gaydos, Patrick Alan Hogan, Shuwei Sun
  • Patent number: 8449817
    Abstract: The invention is directed at sputter targets including 50 atomic % or more molybdenum, a second metal element of niobium or vanadium, and a third metal element selected from the group consisting of titanium, chromium, niobium, vanadium, and tantalum, wherein the third metal element is different from the second metal element, and deposited films prepared by the sputter targets. In a preferred aspect of the invention, the sputter target includes a phase that is rich in molybdenum, a phase that is rich in the second metal element, and a phase that is rich in the third metal element.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: May 28, 2013
    Assignee: H.C. Stark, Inc.
    Inventors: Gary Alan Rozak, Mark E. Gaydos, Patrick Alan Hogan, Shuwei Sun
  • Publication number: 20120285826
    Abstract: A sputtering target that includes at least two consolidated blocks, each block including an alloy including molybdenum in an amount greater than about 30 percent by weight and at least one additional alloying ingredient; and a joint between the at least two consolidated blocks, the joint being free of any microstructure due to an added bonding agent (e.g., powder, foil or otherwise), and being essentially free of any visible joint line the target that is greater than about 200 ?m width (e.g., less than about 50 ?m width). A process for making the target includes hot isostatically pressing, below a temperature of 1080° C., consolidated perform blocks that may be surface prepared (e.g., roughened to a predetermined roughness value) prior to pressing.
    Type: Application
    Filed: May 9, 2012
    Publication date: November 15, 2012
    Applicant: H.C. STARCK, INC.
    Inventors: Gary Alan Rozak, Mark E. Gaydos
  • Publication number: 20120003486
    Abstract: The invention is directed at sputter targets including 50 atomic % or more molybdenum, a second metal element of niobium or vanadium, and a third metal element selected from the group consisting of titanium, chromium, niobium, vanadium, and tantalum, wherein the third metal element is different from the second metal element, and deposited films prepared by the sputter targets. In a preferred aspect of the invention, the sputter target includes a phase that is rich in molybdenum, a phase that is rich in the second metal element, and a phase that is rich in the third metal element.
    Type: Application
    Filed: June 30, 2010
    Publication date: January 5, 2012
    Applicant: H.C. STARCK, INC.
    Inventors: Gary Alan Rozak, Mark E. Gaydos, Patrick Alan Hogan, Shuwei Sun
  • Publication number: 20110117375
    Abstract: The invention is directed at sputter targets including 50 atomic % or more molybdenum, a second metal element of titanium, and a third metal element of chromium or tantalum, and deposited films prepared by the sputter targets. In a preferred aspect of the invention, the sputter target includes a phase that is rich in molybdenum, a phase that is rich in titanium, and a phase that is rich in the third metal element.
    Type: Application
    Filed: June 30, 2010
    Publication date: May 19, 2011
    Applicant: H.C. STARCK, INC.
    Inventors: Gary Alan Rozak, Mark E. Gaydos, Patrick Alan Hogan, Shuwei Sun
  • Publication number: 20110097236
    Abstract: Molybdenum titanium sputter targets are provided. In one aspect, the targets are substantially free of the ?(Ti, Mo) alloy phase. In another aspect, the targets are substantially comprised of single phase ?(Ti, Mo) alloy. In both aspects, particulate emission during sputtering is reduced. Methods of preparing the targets, methods of bonding targets together to produce large area sputter targets, and films produced by the targets, are also provided.
    Type: Application
    Filed: November 2, 2010
    Publication date: April 28, 2011
    Applicant: H. C. Starck Inc.
    Inventors: Mark E. Gaydos, Prabhat Kumar, Steve Miller, Norman C. Mills, Gary Rozak, Rong-Chein Richard Wu
  • Publication number: 20010001640
    Abstract: A method of making a low density part with a closed porosity surface coating is formed by applying, to a porous powder preform, a coating of powder finer than that of the preform which is sinterable to a near full density below the melting temperature of the powder; and heating the coated preform to sinter the coating to form a near full density, gas impermeable, closed porosity surface coating on the preform.
    Type: Application
    Filed: March 16, 1999
    Publication date: May 24, 2001
    Applicant: Steven A. Miller et al
    Inventors: STEVEN A. MILLER, WILLIAM T. NACHTRAB, MARK E. GAYDOS