Patents by Inventor Mark Edward McNie
Mark Edward McNie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9412566Abstract: Methods are disclosed for depositing material onto and/or etching material from a substrate in a surface processing tool having a processing chamber, a controller and one or more devices for adjusting the process parameters within the chamber. The method comprises: the controller instructing the one or more devices according to a series of control steps, each control step specifying a defined set of process parameters that the one or more devices are instructed to implement, wherein at least one of the control steps comprises the controller instructing the one or more devices to implement a defined set of constant process parameters for the duration of the step, including at least a chamber pressure and gas flow rate through the chamber, which duration is less than the corresponding gas residence time (Tgr) of the processing chamber for the step.Type: GrantFiled: February 27, 2013Date of Patent: August 9, 2016Assignee: Oxford Instruments Nanotechnology Tools LimitedInventors: Mark Edward McNie, Michael Joseph Cooke, Leslie Michael Lea
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Publication number: 20150011088Abstract: Methods are disclosed for depositing material onto and/or etching material from a substrate in a surface processing tool having a processing chamber, a controller and one or more devices for adjusting the process parameters within the chamber. The method comprises: the controller instructing the one or more devices according to a series of control steps, each control step specifying a defined set of process parameters that the one or more devices are instructed to implement, wherein at least one of the control steps comprises the controller instructing the one or more devices to implement a defined set of constant process parameters for the duration of the step, including at least a chamber pressure and gas flow rate through the chamber, which duration is less than the corresponding gas residence time (Tgr) of the processing chamber for the step.Type: ApplicationFiled: February 27, 2013Publication date: January 8, 2015Inventors: Mark Edward McNie, Michael Joseph Cooke, Leslie Michael Lea
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Publication number: 20110228379Abstract: An optical tag (200) comprises a chalcogenide glass corner-cube reflector (202) bonded to a silicon MEMS modulator (206) by means of a glass material (214) having a lower softening temperature than that of the reflector. The tag is provided with AR coatings (210, 212). The invention provides a robust, integrated and compact optical tag having a wide field of view and low manufacturing costs.Type: ApplicationFiled: November 25, 2009Publication date: September 22, 2011Applicant: QINETIQ LIMITEDInventors: Paul David Mason, David Arthur Orchard, Andrew Maxwell Scott, Kevin Michael Brunson, Mark Edward McNie
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Patent number: 7969639Abstract: A micro-opto-electro-mechanical systems (MOEMS) electro optical modulator (2) having an electrically tuneable optical resonator comprising an asymmetric Fabry-Perot etalon incorporating a mirror (10) resiliency biased with respect to a substrate (13) and moveable in relation thereto in response to a voltage applied there-between. The optical modulator (2) is capable of modulating electromagnetic radiation having a plurality of wavelengths. The modulator is adapted to modulate the transmission of short wave infrared radiation (SWIR), medium wave infrared radiation (MWIR) and long wave infrared radiation (LWIR) and the reflection of visible radiation. A spatial optical modulator having a plurality of said MOEMS optical modulators (2). A method of addressing said spatial optical modulator.Type: GrantFiled: February 6, 2007Date of Patent: June 28, 2011Assignee: QinetiQ LimitedInventors: Mark Edward McNie, Keith Loder Lewis, Andrew Maxwell Scott, Christopher William Slinger, Kevin Michael Brunson, Gilbert William Smith
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Patent number: 7940446Abstract: An optical modulator comprising a spacing-controllable etalon having at least one sprung micro-mirror suspended above a substrate. At least one electrically insulating stop is provided between the micro-mirror and the substrate to avoid short-circuit when the micro-mirror is drawn towards the substrate by an applied voltage. An optical detector detects the time of arrival of a first laser pulse. A control circuit predicts from this an arrival time of the next incident laser pulse and, responsive to a control signal, either retains the micro-mirror in its pulled-down state held against the insulating stops or releases the micro-mirror at a time predicted to maximise or minimise the light transmitted through the modulator. After a time interval calculated to permit a predetermined number of mechanical oscillations, the micro-mirror is pulled back down onto the stops.Type: GrantFiled: October 19, 2006Date of Patent: May 10, 2011Assignee: Qinetiq LimitedInventors: Andrew Maxwell Scott, Mark Edward McNie, Kevin Michael Brunson
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Publication number: 20090052008Abstract: A micro-opto-electro-mechanical systems (MOEMS) electro optical modulator (2) having an electrically tuneable optical resonator comprising an asymmetric Fabry-Perot etalon incorporating a mirror (10) resiliency biased with respect to a substrate (13) and moveable in relation thereto in response to a voltage applied there-between. The optical modulator (2) is capable of modulating electromagnetic radiation having a plurality of wavelengths. The modulator is adapted to modulate the transmission of short wave infrared radiation (SWIR), medium wave infrared radiation (MWIR) and long wave infrared radiation (LWIR) and the reflection of visible radiation. A spatial optical modulator having a plurality of said MOEMS optical modulators (2). A method of addressing said spatial optical modulator.Type: ApplicationFiled: February 6, 2007Publication date: February 26, 2009Applicant: QINETIQ LIMITEDInventors: Mark Edward Mcnie, Keith Loder Lewis, Andrew Maxwell Scott, Christopher William Slinger, Kevin Michael Brunson, Gilbert William Smith
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Publication number: 20080239457Abstract: An optical modulator comprising a spacing-controllable etalon having at least one sprung micro-mirror suspended above a substrate. At least one electrically insulating stop is provided between the micro-mirror and the substrate to avoid short-circuit when the micro-mirror is drawn towards the substrate by an applied voltage. An optical detector detects the time of arrival of a first laser pulse. A control circuit predicts from this an arrival time of the next incident laser pulse and, responsive to a control signal, either retains the micro-mirror in its pulled-down state held against the insulating stops or releases the micro-mirror at a time predicted to maximise or minimise the light transmitted through the modulator. After a time interval calculated to permit a predetermined number of mechanical oscillations, the micro-mirror is pulled back down onto the stops.Type: ApplicationFiled: October 19, 2006Publication date: October 2, 2008Inventors: Andrew Maxwell Scott, Mark Edward McNie, Kevin Michael Brunson
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Patent number: 7205173Abstract: A MEMS incorporating a sensing element and a JFET electrically connected to the sensing element is fabricated by the steps of: forming a first layer of electrically insulating barrier material on a surface of a substrate; patterning the first layer so as to expose a first region of the substrate; doping by ion implantation the first region of the substrate to form a well region of the JFET; forming a second layer of barrier material on the surface of both the first layer and the first region of the substrate; patterning the barrier material so as to expose a part of the first region of the substrate; doping by ion implantation the exposed part of the first region of the substrate to form source and drain contact areas of the JFET; patterning the barrier material so as to expose a second region of the substrate; and doping by ion implantation the second region of the substrate to form gate and substrate contact areas of the JFET in a single implantion step.Type: GrantFiled: March 19, 2003Date of Patent: April 17, 2007Assignee: QinetiQ LimitedInventors: Kevin Michael Brunson, David James Hamilton, Robert John Tremayne Bunyan, Mark Edward McNie
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Patent number: 7072542Abstract: A multi-mode interference (MMI) device, comprising a hollow core multi-mode waveguide optically coupled to at least one hollow core input waveguide, is described in which the internal surfaces of the hollow core waveguides carry a reflective coating. The coating may be a low refractive index material at the wavelength of operation, such as a metal, or a multiple layer dielectric stack. Resonators and optical amplifiers using such (MMI) devices are also described.Type: GrantFiled: January 29, 2003Date of Patent: July 4, 2006Assignee: Qinetiq LimitedInventors: Richard Michael Jenkins, Mark Edward McNie
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Patent number: 6980362Abstract: An optical interference filter (2) is provided by a substrate (1) in which is formed a plurality of parallel slots so as to define layers (slots and substrate laminae) of alternating refractive index. As shown, the filter comprises a central Fabry-Perot resonator slot cavity (3) between two mirror groups (4, 5) of alternating slots and substrate laminae, and is coupled to optical fibers (7) accommodated in V-grooves (6) on either side. For tuning, one mirror group (5) may be movable in the direction of arrow (A), or, where the central resonator is provided by substrate material, by altering its temperature. One or more further Fabry-Perot filters may be formed in the substrate and coupled to the filter (2). The invention encompasses non-resonating filters.Type: GrantFiled: November 23, 2001Date of Patent: December 27, 2005Assignee: Qinetiq LimitedInventors: Keith Loder Lewis, Gilbert William Smith, Mark Edward McNie
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Publication number: 20040057144Abstract: An optical interference filter (2) is provided by a substrate (1) in which is formed a plurality of parallel slots so as to define layers (slots and substrate laminae) of alternating refractive index. As shown, the filter comprises a central Fabry-Perot resonator slot cavity (3) between two mirror groups (4, 5) of alternating slots and substrate laminae, and is coupled to optical fibres (7) accommodated in V-grooves (6) on either side. For tuning, one mirror group (5) may be movable in the direction of arrow (A), or, where the central resonator is provided by substrate material, by altering its temperature. One or more further Fabry-Perot filters may be formed in the substrate and coupled to the filter (2). The invention encompasses non-resonating filters.Type: ApplicationFiled: May 30, 2003Publication date: March 25, 2004Inventors: Keith Loder Lewis, Gilbert William Smith, Mark Edward Mcnie