Patents by Inventor Mark G. Simon

Mark G. Simon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Retainer ring and method for polishing a workpiece
    Publication number: 20020164926
    Abstract: A chemical mechanical polishing (CMP) machine (20) includes a workpiece carrier assembly (22) having a carrier base (24) with a workpiece contacting side (26) for holding a first surface (30) of a workpiece (32). A method utilizing the CMP machine (20) to polish the workpiece (32) and achieve a minimal edge exclusion region (92) entails adapting the carrier base (24) to reduce a first diameter (53) of a workpiece contacting side (26) of the carrier base (24) to a second diameter (84). The method further calls for providing a retainer ring (68, 106) disposed concentrically on the carrier base (24) for retaining the workpiece (32), and applying pressure on the carrier base (24) to urge a second surface (34) of the workpiece (36) against a polishing pad (36) of the CMP machine (20).
    Type: Application
    Filed: May 7, 2001
    Publication date: November 7, 2002
    Inventor: Mark G. Simon