Abstract: A pressure sensor assembly includes a pressure sensor, a pedestal and an electrically conductive header having a header cavity. The pressure sensor includes, an electrically conductive sensing layer having a sensor diaphragm, an electrically conductive backing layer having a bottom surface that is bonded to the sensing layer, an electrically insulative layer having a bottom surface that is bonded to a top surface of the backing layer, and a sensor element having an electrical parameter that changes based on a deflection of the sensor diaphragm in response to a pressure difference. The pedestal is bonded to the electrically insulative layer and attached to the header within the header cavity.

Abstract: A pressure sensor assembly includes a pressure sensor, a pedestal and an electrically conductive header having a header cavity. The pressure sensor includes, an electrically conductive sensing layer having a sensor diaphragm, an electrically conductive backing layer having a bottom surface that is bonded to the sensing layer, an electrically insulative layer having a bottom surface that is bonded to a top surface of the backing layer, and a sensor element having an electrical parameter that changes based on a deflection of the sensor diaphragm in response to a pressure difference. The pedestal is bonded to the electrically insulative layer and attached to the header within the header cavity.

Abstract: A pressure sensor includes a base having at least one high-pressure contact portion and a diaphragm positioned over the base and having an external top surface facing away from the base and internal surfaces facing the base. The internal surfaces comprising a raised perimeter surrounding an interior, a raised central boss within the interior, and a raised boss arm contiguous with and extending from the raised perimeter toward the interior. At least one of the raised boss arm and raised central boss are aligned with and contact a high-pressure contact portion of the base during an over-pressure event.

Abstract: A pressure sensor includes a base having at least one high-pressure contact portion and a diaphragm positioned over the base and having an external top surface facing away from the base and internal surfaces facing the base. The internal surfaces comprising a raised perimeter surrounding an interior, a raised central boss within the interior, and a raised boss arm contiguous with and extending from the raised perimeter toward the interior. At least one of the raised boss arm and raised central boss are aligned with and contact a high-pressure contact portion of the base during an over-pressure event.

Abstract: A pressure sensor includes a base having a high-pressure contact portion, and a diaphragm positioned over the base and having an external top surface opposite the base. The external top surface is defined within a closed perimeter and external side surfaces extend down from an entirety of the closed perimeter toward the base. A high-pressure contact portion of the diaphragm is aligned with and separated by a gap from the high-pressure contact portion of the base. A sensing element is coupled to the diaphragm and provides an output based on changes to the diaphragm. When a hydrostatic pressure load above a threshold value is applied to the entire external top surface and external side surfaces of the diaphragm, the hydrostatic pressure load causes the high-pressure contact portion of the diaphragm to contact the high-pressure contact portion of the base.

Abstract: A pressure sensor includes a base having a high-pressure contact portion, and a diaphragm positioned over the base and having an external top surface opposite the base. The external top surface is defined within a closed perimeter and external side surfaces extend down from an entirety of the closed perimeter toward the base. A high-pressure contact portion of the diaphragm is aligned with and separated by a gap from the high-pressure contact portion of the base. A sensing element is coupled to the diaphragm and provides an output based on changes to the diaphragm. When a hydrostatic pressure load above a threshold value is applied to the entire external top surface and external side surfaces of the diaphragm, the hydrostatic pressure load causes the high-pressure contact portion of the diaphragm to contact the high-pressure contact portion of the base.

Abstract: A variable optical attenuator has a first and second waveguides that are optically coupled together. At least one of the waveguides has a movable cantilever portion that is movable relative to the other to control attenuation of an optical signal traveling between the two. Preferably, electrically driven actuators deflect the movable waveguides to a relative position at which a desired optical attenuation value is achieved. The electrically driven actuator receives a drive signal that controls the amount of deflection. The drive signal may be set to achieve a desired value for an electrical parameter that varies with the position of the movable waveguide and may be sensed by the electrically driven actuator. In some examples, the drive signal is set to achieve a desired capacitance or voltage difference between the movable waveguide and an electrode.

Abstract: A variable optical attenuator has a first movable waveguide support and a second waveguide support that include first and second waveguides, respectively, such that the first and second waveguides are aligned for propagating an optical energy. An electrically driven actuator positions the movable waveguide support for coupled, optical misalignment relative to the second support to achieve a desired optical attenuation value. The movable waveguide support may be in a cantilevered configuration in which a distal end extends over a surface having an electrode. In this example, applying a drive signal to the electrode deflects the movable support such that the signal coupled between the first waveguide to the second waveguide is attenuated. The drive signal may be set to achieve a desired value for an electrical parameter that varies with the position of the movable waveguide support.

Abstract: A variable optical attenuator has a first waveguide and a second waveguide that are optically coupled together. At least one of the waveguides has a movable cantilever portion that is movable relative to the other to control attenuation of an optical signal traveling between the two. Preferably, electrically driven actuators deflect the movable waveguides to a relative position at which a desired optical attenuation value is achieved. Each movable waveguide may deflect in an opposite direction to the other waveguide. The electrically driven actuator receives a drive signal that controls the amount of deflection. The electrically driven actuator may be an electrostatic, electrothermic, or electromagnetic actuator. In the example of an electrostatic actuator, one electrode may be disposed on a movable waveguide and another adjacent the moveable waveguide to create the electrostatic force that moves the waveguide.

Abstract: A variable optical attenuator has a first movable waveguide support and a second waveguide support that include first and second waveguides, respectively, such that the first and second waveguides are aligned for propagating an optical energy. An electrically driven actuator positions the movable waveguide support for coupled, optical misalignment relative to the second support to achieve a desired optical attenuation value. The movable waveguide support may be in a cantilevered configuration in which a distal end extends over a surface having an electrode. In this example, applying a drive signal to the electrode deflects the movable support such that the signal coupled between the first waveguide to the second waveguide is attenuated. The drive signal may be set to achieve a desired value for an electrical parameter that varies with the position of the movable waveguide support.