Patents by Inventor Mark Geshel
Mark Geshel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230197197Abstract: The present disclosure provides methods, systems, and media for accurate and efficient estimation of a genome of a genus.Type: ApplicationFiled: August 3, 2022Publication date: June 22, 2023Inventors: Avishai Bartov, Yoav Etzioni, Mark Geshel, Mark Pratt, Gilad Almogy
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Patent number: 11462300Abstract: The present disclosure provides methods, systems, and media for accurate and efficient estimation of a genome of a genus.Type: GrantFiled: August 9, 2021Date of Patent: October 4, 2022Assignee: Ultima Genomics, Inc.Inventors: Avishai Bartov, Yoav Etzioni, Mark Geshel, Mark Pratt, Gilad Almogy
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Publication number: 20210366576Abstract: The present disclosure provides methods, systems, and media for accurate and efficient estimation of a genome of a genus.Type: ApplicationFiled: August 9, 2021Publication date: November 25, 2021Inventors: Avishai Bartov, Yoav Etzioni, Mark Geshel, Mark Pratt, Gilad Almogy
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Patent number: 10663407Abstract: Data indicative of alignment targets may be received. Each alignment target may be associated with a target location on an object. Locations of the object to be inspected may be identified. An alignment target from the alignment targets may be selected. Each of the locations may be within a determined distance from the selected alignment target. An indication may be provided to align the object relative to an examination tool for inspecting the locations within the determined distance from the selected alignment target.Type: GrantFiled: December 20, 2018Date of Patent: May 26, 2020Assignee: Applied Materials Israel Ltd.Inventors: Idan Kaizerman, Mark Geshel
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Publication number: 20190234887Abstract: Data indicative of alignment targets may be received. Each alignment target may be associated with a target location on an object. Locations of the object to be inspected may be identified. An alignment target from the alignment targets may be selected. Each of the locations may be within a determined distance from the selected alignment target. An indication may be provided to align the object relative to an examination tool for inspecting the locations within the determined distance from the selected alignment target.Type: ApplicationFiled: December 20, 2018Publication date: August 1, 2019Inventors: Idan KAIZERMAN, Mark GESHEL
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Patent number: 10290087Abstract: There are provided system and method of generating an examination recipe usable for examining a specimen, the method comprising: capturing images from dies and obtaining noise map indicative of noise distribution on the images; receiving design data representative of a plurality of design groups each having the same design pattern; calculating a group score for each given design group, the group score calculated based on the noise data associated with the given design group and a defect budget allocated for area of the given design group; providing segmentation related to the dies, comprising: associating design groups with segmentation labels indicative of different noise levels based on the group score, thereby obtaining a set of die segments each corresponding to one or more design groups associated with the same segmentation label and segmentation configuration data; and generating an examination recipe using the segmentation configuration data.Type: GrantFiled: September 11, 2017Date of Patent: May 14, 2019Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Ariel Shkalim, Moshe Amzaleg, Eyal Neistein, Shlomo Tubul, Mark Geshel, Elad Cohen
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Publication number: 20190080447Abstract: There are provided system and method of generating an examination recipe usable for examining a specimen, the method comprising: capturing images from dies and obtaining noise map indicative of noise distribution on the images; receiving design data representative of a plurality of design groups each having the same design pattern; calculating a group score for each given design group, the group score calculated based on the noise data associated with the given design group and a defect budget allocated for area of the given design group; providing segmentation related to the dies, comprising: associating design groups with segmentation labels indicative of different noise levels based on the group score, thereby obtaining a set of die segments each corresponding to one or more design groups associated with the same segmentation label and segmentation configuration data; and generating an examination recipe using the segmentation configuration data.Type: ApplicationFiled: September 11, 2017Publication date: March 14, 2019Inventors: Ariel SHKALIM, Moshe AMZALEG, Eyal NEISTEIN, Shlomo TUBUL, Mark GESHEL, Elad COHEN
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Patent number: 10161882Abstract: A method, computerized system and computer program product for examining an object using a processor operatively connected to a memory, the method comprising: accommodating in the memory data indicative of a plurality of alignment targets, each alignment target associated with a target location on an object; accommodating in the memory a plurality of locations to be captured; and selecting by the processor an alignment target subset of the plurality of alignment targets, such that each of the plurality of locations is associated with and is within a determined distance from a single alignment target from the alignment target subset, the distance determined in accordance with a provided field of view, and wherein the alignment target subset comprises fewer targets than locations to be reviewed, the alignment target being usable for aligning the object relative to an examination tool for capturing the locations associated with the single alignment target.Type: GrantFiled: July 28, 2016Date of Patent: December 25, 2018Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Idan Kaizerman, Mark Geshel
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Patent number: 9401013Abstract: There is provided an inspection method capable of classifying defects detected on a production layer of a specimen. The method comprises: obtaining input data related to the detected defects; processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof; and sorting the processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation, wherein at least one classification operation sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each classification operation, excluding the last one, sorts at least part of the processed defects to be processed by one or more of the following classification operations.Type: GrantFiled: January 31, 2013Date of Patent: July 26, 2016Assignee: Applied Materials Israel, Ltd.Inventors: Mark Geshel, Zvi Goren, Efrat Rozenman
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Publication number: 20150356719Abstract: There is provided an inspection method capable of classifying defects detected on a production layer of a specimen. The method comprises: obtaining input data related to the detected defects; processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof; and sorting the processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation, wherein at least one classification operation sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each classification operation, excluding the last one, sorts at least part of the processed defects to be processed by one or more of the following classification operations.Type: ApplicationFiled: January 31, 2013Publication date: December 10, 2015Applicant: APPLIED MATERIALS ISRAEL LTD.Inventors: MARK GESHEL, ZVI GOREN, EFRAT ROZENMAN
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Patent number: 9141730Abstract: A computer creates a recipe for a manufacturing tool based on design data. The computer obtains the design data, which includes basic elements and hierarchical levels corresponding to the basic elements. The computer selects one or more basic elements of interest and generates one or more sets of simple array cells corresponding to a level of interest. The computer uses the sets of simple array cells to identify periodical areas in level-of-interest coordinates to enable automated recipe creation. The periodical areas are identified with respect to one or more basic elements.Type: GrantFiled: September 12, 2011Date of Patent: September 22, 2015Assignee: Applied Materials Israel, Ltd.Inventors: Mark Geshel, Avishai Bartov
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Publication number: 20140212022Abstract: There is provided an inspection method capable of classifying defects detected on a production layer of a specimen. The method comprises: obtaining input data related to the detected defects; processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof; and sorting the processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation, wherein at least one classification operation sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each classification operation, excluding the last one, sorts at least part of the processed defects to be processed by one or more of the following classification operations.Type: ApplicationFiled: January 31, 2013Publication date: July 31, 2014Applicant: APPLIED MATERIALS ISRAEL LTD.Inventors: MARK GESHEL, ZVI GOREN, EFRAT ROZENMAN
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Patent number: 8640060Abstract: There is provided a computer-implemented method of creating a recipe for a manufacturing tool and a system thereof. The method comprises: upon obtaining data characterizing periodical sub-arrays in one or more dies, generating candidate stitches; identifying one or more candidate stitches characterized by periodicity characteristics satisfying, at least, a periodicity criterion, thereby identifying periodical stitches among the candidate stitches; and aggregating the identified periodical stitches and the periodical sub-arrays into periodical arrays, said periodical arrays to be used for automated recipe creation.Type: GrantFiled: May 29, 2012Date of Patent: January 28, 2014Assignee: Applied Materials Israel, Ltd.Inventor: Mark Geshel
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Publication number: 20130326443Abstract: There is provided a computer-implemented method of creating a recipe for a manufacturing tool and a system thereof. The method comprises: upon obtaining data characterizing periodical sub-arrays in one or more dies, generating candidate stitches; identifying one or more candidate stitches characterized by periodicity characteristics satisfying, at least, a periodicity criterion, thereby identifying periodical stitches among the candidate stitches; and aggregating the identified periodical stitches and the periodical sub-arrays into periodical arrays, said periodical arrays to be used for automated recipe creation.Type: ApplicationFiled: May 29, 2012Publication date: December 5, 2013Applicant: Applied Materials Israel Ltd.Inventor: Mark Geshel
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Publication number: 20130066454Abstract: A computer creates a recipe for a manufacturing tool based on design data. The computer obtains the design data, which includes basic elements and hierarchical levels corresponding to the basic elements. The computer selects one or more basic elements of interest and generates one or more sets of simple array cells corresponding to a level of interest. The computer uses the sets of simple array cells to identify periodical areas in level-of-interest coordinates to enable automated recipe creation. The periodical areas are identified with respect to one or more basic elements.Type: ApplicationFiled: September 12, 2011Publication date: March 14, 2013Inventors: Mark Geshel, Avishai Bartov
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Patent number: 7155052Abstract: A method for inspecting a patterned surface employs reference data related to the pattern to provide a map for identifying regions which are expected to generate equivalent images. These regions are then compared in an image-to-image comparison to identify possible defects. In a first implementation, the regions are related by local symmetry operators. In a second, disjoint corner features or other features are classified and similar features compared.Type: GrantFiled: June 10, 2002Date of Patent: December 26, 2006Assignee: Tokyo Seimitsu (Israel) LtdInventors: Mark Geshel, Niv Shmueli, Gideon Friedmann, Orna Bregman-Amitai
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Publication number: 20030228050Abstract: A method for inspecting a patterned surface employs reference data related to the pattern to provide a map for identifying regions which are expected to generate equivalent images. These regions are then compared in an image-to-image comparison to identify possible defects. In a first implementation, the regions are related by local symmetry operators. In a second, disjoint corner features or other features are classified and similar features compared.Type: ApplicationFiled: June 10, 2002Publication date: December 11, 2003Applicant: Tokyo Seimitsu Israel Ltd.Inventors: Mark Geshel, Niv Shmueli, Gideon Friedmann, Orna Bregman-Amitai