Patents by Inventor Mark Graeme Martin Harris

Mark Graeme Martin Harris has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of sputtering using krypton
    Publication number: 20030024808
    Abstract: A method of sputtering a layer from a target having a plurality of recesses or openings includes using Krypton as a sputtering gas and is characterized in that the gas flow is less than 20 sccm and or the Krypton pressure is less than 1 militor.
    Type: Application
    Filed: August 21, 2002
    Publication date: February 6, 2003
    Inventors: Hilke Donohue, Mark Graeme Martin Harris
  • Methods of forming a barrier layer
    Patent number: 6174823
    Abstract: This invention relates to methods of forming a barrier layer including depositing a layer of Titanium Nitride and subsequently nitriding the surface of that layer. In some embodiments the Titanium Nitride layer is exposed to Oxygen prior to the nitroding step.
    Type: Grant
    Filed: November 21, 1997
    Date of Patent: January 16, 2001
    Assignee: Trikon Equipments Limited
    Inventors: Christopher David Dobson, Mark Graeme Martin Harris, Keith Edward Buchanan