Patents by Inventor Mark H. Clark

Mark H. Clark has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8816315
    Abstract: A memory cell is provided that includes a reversible resistance-switching element above a substrate. The reversible resistance-switching element includes an etched material layer that includes an oxidized layer of the etched material layer above a non-oxidized layer of the etched material layer. Numerous other aspects are provided.
    Type: Grant
    Filed: February 11, 2013
    Date of Patent: August 26, 2014
    Assignee: SanDisk 3D LLC
    Inventors: April D. Schricker, Brad Herner, Mark H. Clark
  • Patent number: 8809114
    Abstract: A method of forming a memory cell is provided that includes forming a steering element above a substrate, forming a material layer on the substrate, patterning and etching the material layer, and oxidizing the patterned and etched material layer to form a reversible resistance-switching material. Numerous other aspects are provided.
    Type: Grant
    Filed: August 12, 2013
    Date of Patent: August 19, 2014
    Assignee: SanDisk 3D LLC
    Inventors: April D. Schricker, S. Brad Herner, Mark H. Clark
  • Publication number: 20130320287
    Abstract: A method of forming a memory cell is provided that includes forming a steering element above a substrate, forming a material layer on the substrate, patterning and etching the material layer, and oxidizing the patterned and etched material layer to form a reversible resistance-switching material. Numerous other aspects are provided.
    Type: Application
    Filed: August 12, 2013
    Publication date: December 5, 2013
    Applicant: SanDisk 3D LLC
    Inventors: April D. Schricker, S. Brad Herner, Mark H. Clark
  • Patent number: 8507315
    Abstract: A method of forming a memory cell is provided that includes forming a steering element above a substrate, and forming a reversible resistance-switching element coupled to the steering element. The reversible resistance-switching element includes one or more of TiOx, Ta2O5, Nb2O5, Al2O3, HfO2, and V2O5, and the reversible resistance switching element is formed without being etched. Numerous other aspects are provided.
    Type: Grant
    Filed: May 4, 2012
    Date of Patent: August 13, 2013
    Assignee: SanDisk 3D LLC
    Inventors: April D. Schricker, S. Brad Herner, Mark H. Clark
  • Patent number: 8501522
    Abstract: A donor silicon wafer may be bonded to a substrate and a lamina cleaved from the donor wafer. A photovoltaic cell may be formed from the lamina bonded to the substrate. An intermetal stack is described that is optimized for use in such a cell. The intermetal stack may include a transparent conductive oxide layer serving as a quarter-wave plate, a low resistance layer, an adhesion layer to help adhesion to the receiver element, and may also include a barrier layer to prevent or impede unwanted diffusion within the stack.
    Type: Grant
    Filed: August 16, 2011
    Date of Patent: August 6, 2013
    Assignee: GTAT Corporation
    Inventors: S. Brad Herner, Mark H. Clark, Christopher J. Petti
  • Patent number: 8467224
    Abstract: In some aspects, a microelectronic structure is provided that includes (1) a first conducting layer; (2) a first dielectric layer formed above the first conducting layer and having a feature that exposes a portion of the first conducting layer; (3) a graphitic carbon film disposed on a sidewall of the feature defined by the first dielectric layer and in contact with the first conducting layer at a bottom of the feature; and (4) a second conducting layer disposed above and in contact with the graphitic carbon film. Numerous other aspects are provided.
    Type: Grant
    Filed: April 9, 2009
    Date of Patent: June 18, 2013
    Assignee: SanDisk 3D LLC
    Inventors: April D. Schricker, Mark H. Clark, Andy Fu, Huiwen Xu
  • Patent number: 8450835
    Abstract: One embodiment of the invention provides a semiconductor diode device including a first conductivity type region, a second conductivity type region, where the second conductivity type is different from the first conductivity type, an intrinsic region located between the first conductivity type region and the second conductivity type region; a first halo region of the first conductivity type located between the second conductivity type region and the intrinsic region, and optionally a second halo region of the second conductivity type located between the first conductivity type region and the intrinsic region.
    Type: Grant
    Filed: April 29, 2008
    Date of Patent: May 28, 2013
    Assignee: SanDisk 3D LLC
    Inventors: Xiying Chen, Mark H. Clark, S. Brad Herner, Tanmay Kumar
  • Patent number: 8373150
    Abstract: In some aspects, a memory cell is provided that includes (1) a steering element above a substrate; and (2) a reversible resistance-switching element coupled to the steering element, wherein the reversible resistance-switching element is selectively formed by: (a) forming a material layer on the substrate; (b) etching the material layer; and (c) oxidizing the etched material layer to form a reversible resistance-switching material. Numerous other aspects are provided.
    Type: Grant
    Filed: March 1, 2011
    Date of Patent: February 12, 2013
    Assignee: SanDisk 3D, LLC
    Inventors: April D. Schricker, Brad Herner, Mark H. Clark
  • Patent number: 8268678
    Abstract: A method of making a non-volatile memory device includes providing a substrate having a substrate surface, and forming a non-volatile memory array over the substrate surface. The non-volatile memory array includes an array of semiconductor diodes, and each semiconductor diode of the array of semiconductor diodes is disposed substantially parallel to the substrate surface.
    Type: Grant
    Filed: November 18, 2010
    Date of Patent: September 18, 2012
    Assignee: SanDisk 3D LLC
    Inventors: Steven Maxwell, Michael Konevecki, Mark H. Clark, Usha Raghuram
  • Publication number: 20120208317
    Abstract: A donor silicon wafer may be bonded to a substrate and a lamina cleaved from the donor wafer. A photovoltaic cell may be formed from the lamina bonded to the substrate. An intermetal stack is described that is optimized for use in such a cell. The intermetal stack may include a transparent conductive oxide layer serving as a quarter-wave plate, a low resistance layer, an adhesion layer to help adhesion to the receiver element, and may also include a barrier layer to prevent or impede unwanted diffusion within the stack.
    Type: Application
    Filed: August 16, 2011
    Publication date: August 16, 2012
    Applicant: TWIN CREEKS TECHNOLOGIES, INC.
    Inventors: S. Brad Herner, Mark H. Clark, Christopher J. Petti
  • Patent number: 8173486
    Abstract: In some aspects, a method of forming a memory cell is provided that includes (1) forming a steering element above a substrate; and (2) selectively forming a reversible resistance-switching element coupled to the steering element by: (a) forming a material layer on the substrate; (b) etching the material layer; and (c) oxidizing the etched material layer to form a reversible resistance-switching material. Numerous other aspects are provided.
    Type: Grant
    Filed: October 29, 2010
    Date of Patent: May 8, 2012
    Assignee: SanDisk 3D LLC
    Inventors: April D. Schricker, S. Brad Herner, Mark H. Clark
  • Patent number: 8102694
    Abstract: A nonvolatile memory device includes at least one nonvolatile memory cell which comprises a silicon, germanium or silicon-germanium diode which is doped with at least one of carbon or nitrogen in a concentration greater than an unavoidable impurity level concentration.
    Type: Grant
    Filed: June 25, 2007
    Date of Patent: January 24, 2012
    Assignee: SanDisk 3D LLC
    Inventors: S. Brad Herner, Mark H. Clark, Tanmay Kumar
  • Patent number: 8072791
    Abstract: A method of making a nonvolatile memory device includes forming a first electrode, forming at least one nonvolatile memory cell comprising a silicon, germanium or silicon-germanium diode, doping the diode with at least one of nitrogen or carbon, and forming a second electrode over the at least one nonvolatile memory cell.
    Type: Grant
    Filed: June 25, 2007
    Date of Patent: December 6, 2011
    Assignee: SanDisk 3D LLC
    Inventors: S. Brad Herner, Mark H. Clark, Tanmay Kumar
  • Patent number: 8049104
    Abstract: A donor silicon wafer may be bonded to a substrate and a lamina cleaved from the donor wafer. A photovoltaic cell may be formed from the lamina bonded to the substrate. An intermetal stack is described that is optimized for use in such a cell. The intermetal stack may include a transparent conductive oxide layer serving as a quarter-wave plate, a low resistance layer, an adhesion layer to help adhesion to the receiver element, and may also include a barrier layer to prevent or impede unwanted diffusion within the stack.
    Type: Grant
    Filed: September 30, 2009
    Date of Patent: November 1, 2011
    Assignee: Twin Creek Technologies, Inc.
    Inventors: S. Brad Herner, Mark H. Clark
  • Patent number: 7994064
    Abstract: Ions are implanted into a silicon donor body, defining a cleave plane. A first surface of the donor body is affixed to a receiver element, and a lamina is exfoliated at the cleave plane, creating a second surface of the lamina. There is damaged silicon at the second surface, which will compromise the efficiency of a photovoltaic cell formed from the lamina. A selective etchant, having an etch rate which is positively correlated with the concentration of structural defects in silicon, is used to remove the damaged silicon at the second surface, while removing very little of the relatively undamaged lamina.
    Type: Grant
    Filed: June 15, 2009
    Date of Patent: August 9, 2011
    Assignee: Twin Creeks Technologies, Inc.
    Inventors: Mark H. Clark, S. Brad Herner, Mohamed M. Hilali
  • Patent number: 7977667
    Abstract: Methods of forming planar carbon nanotube (“CNT”) resistivity-switching materials for use in memory cells are provided, that include depositing first dielectric material, patterning the first dielectric material, etching the first dielectric material to form a feature within the first dielectric material, depositing CNT resistivity-switching material over the first dielectric material to fill the feature at least partially with the CNT resistivity-switching material, depositing second dielectric material over the CNT resistivity-switching material, and planarizing the second dielectric material and the CNT resistivity-switching material so as to expose at least a portion of the CNT resistivity-switching material within the feature. Other aspects are also provided.
    Type: Grant
    Filed: April 10, 2009
    Date of Patent: July 12, 2011
    Assignee: SanDisk 3D LLC
    Inventors: April D. Schricker, Mark H. Clark
  • Publication number: 20110076796
    Abstract: A donor silicon wafer may be bonded to a substrate and a lamina cleaved from the donor wafer. A photovoltaic cell may be formed from the lamina bonded to the substrate. An intermetal stack is described that is optimized for use in such a cell. The intermetal stack may include a transparent conductive oxide layer serving as a quarter-wave plate, a low resistance layer, an adhesion layer to help adhesion to the receiver element, and may also include a barrier layer to prevent or impede unwanted diffusion within the stack.
    Type: Application
    Filed: September 30, 2009
    Publication date: March 31, 2011
    Applicant: TWIN CREEKS TECHNOLOGIES, INC.
    Inventors: S. Brad Herner, Mark H. Clark
  • Publication number: 20110065243
    Abstract: A method of making a non-volatile memory device includes providing a substrate having a substrate surface, and forming a non-volatile memory array over the substrate surface. The non-volatile memory array includes an array of semiconductor diodes, and each semiconductor diode of the array of semiconductor diodes is disposed substantially parallel to the substrate surface.
    Type: Application
    Filed: November 18, 2010
    Publication date: March 17, 2011
    Applicant: SanDisk 3D LLC
    Inventors: Steven Maxwell, Michael Konevecki, Mark H. Clark, Usha Raghuram
  • Publication number: 20100317145
    Abstract: Ions are implanted into a silicon donor body, defining a cleave plane. A first surface of the donor body is affixed to a receiver element, and a lamina is exfoliated at the cleave plane, creating a second surface of the lamina. There is damaged silicon at the second surface, which will compromise the efficiency of a photovoltaic cell formed from the lamina. A selective etchant, having an etch rate which is positively correlated with the concentration of structural defects in silicon, is used to remove the damaged silicon at the second surface, while removing very little of the relatively undamaged lamina.
    Type: Application
    Filed: June 15, 2009
    Publication date: December 16, 2010
    Applicant: TWIN CREEKS TECHNOLOGIES, INC.
    Inventors: Mark H. Clark, S. Brad Herner, Mohamed M. Hilali
  • Patent number: 7846782
    Abstract: A method of making a non-volatile memory device includes providing a substrate having a substrate surface, and forming a non-volatile memory array over the substrate surface. The non-volatile memory array includes an array of semiconductor diodes, and each semiconductor diode of the array of semiconductor diodes is disposed substantially parallel to the substrate surface.
    Type: Grant
    Filed: September 28, 2007
    Date of Patent: December 7, 2010
    Assignee: SanDisk 3D LLC
    Inventors: Steven Maxwell, Michael Konevecki, Mark H. Clark, Usha Raghuram