Patents by Inventor Mark Halman

Mark Halman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20050247249
    Abstract: A stanchion attached to a sail boat is provided where the stanchion supports a lifeline near the top of the stanchion and the lifeline runs generally along the outer edge of the deck of the sail boat and the connection of the lifeline to the stanchion can be characterized in part by the maximum deflection point of the lifeline and the stanchion has attached thereto a generally vertically disposed slide disposed away from the central plane of the sail boat.
    Type: Application
    Filed: May 7, 2004
    Publication date: November 10, 2005
    Inventor: Mark Halman
  • Patent number: 5658425
    Abstract: A process for etching of silicon oxide such as silicon dioxide, or oxynitride. The process includes etching a silicon oxide layer to expose an underlying electrically conductive titanium silicide layer and provide a contact opening extending through the silicon oxide layer to the electrically conductive titanium silicide layer. The etching is performed by exposing the silicon oxide layer to an etching gas in an ionized state in a reaction chamber of a plasma generating device. The etching gas includes a fluoride-containing gas and a passivating nitrogen gas which is present in an amount effective to suppress a removal rate of the electrically conductive titanium silicide layer when it is exposed to the etching gas during the etching step. The fluoride-containing gas can be CF.sub.4, CHF.sub.3, C.sub.2 F.sub.6, CH.sub.2 F.sub.2, SF.sub.6, other Freons and mixtures thereof. The etching gas can also include a carrier gas such as Ar, He, Ne, Kr or mixtures thereof.
    Type: Grant
    Filed: June 7, 1995
    Date of Patent: August 19, 1997
    Assignee: LAM Research Corporation
    Inventors: Mark Halman, Paul Rhoades, David Kerr
  • Patent number: 5269879
    Abstract: A process for etching of silicon oxide/nitride such as silicon dioxide, silicon nitride or oxynitride. The process includes etching a silicon oxide/nitride layer to expose an underlying electrically conductive layer and provide a via extending through the silicon oxide/nitride layer to the electrically conductive layer. The etching is performed by exposing the silicon oxide/nitride layer to an etching gas in an ionized state in a reaction chamber of a plasma generating device. The etching gas includes a fluoride-containing gas and a passivating gas which is present in an amount effective to suppress sputtering of the electrically conductive layer when it is exposed to the etching gas during the etching step. The passivating gas can be nitrogen gas and the fluoride-containing gas can be CF.sub.4, CHF.sub.3, C.sub.2 F.sub.6, CH.sub.2 F.sub.2, SF.sub.6, other Freons and mixtures thereof. The etching gas can also include a carrier gas such as Ar, He, Ne, Kr or mixtures thereof.
    Type: Grant
    Filed: October 16, 1991
    Date of Patent: December 14, 1993
    Assignee: Lam Research Corporation
    Inventors: Paul Rhoades, Mark Halman, David Kerr