Patents by Inventor Mark Ian Carruthers

Mark Ian Carruthers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of plasma vapour deposition
    Patent number: 8337675
    Abstract: A method induces plasma vapor deposition of metal into a recess in a workpiece. The method achieves re-sputtering of the metal at the base of the recess with a sputter gas by utilizing a mixture of Ar and He and/or Ne as the sputter gas with a ratio of He and/or Ne:Ar of at least about 10:1.
    Type: Grant
    Filed: January 26, 2010
    Date of Patent: December 25, 2012
    Assignee: SPTS Technologies Limited
    Inventors: Mark Ian Carruthers, Stephen Burgess, Anthony Wilby, Amit Rastogi, Paul Rich, Nicholas Rimmer
  • METHOD OF PLASMA VAPOUR DEPOSITION
    Publication number: 20100187097
    Abstract: A method induces plasma vapour deposition of metal into a recess in a workpiece. The method achieves re-sputtering of the metal at the base of the recess with a sputter gas by utilising a mixture of Ar and He and/or Ne as the sputter gas with a ratio of He and/or Ne:Ar of at least about 10:1.
    Type: Application
    Filed: January 26, 2010
    Publication date: July 29, 2010
    Applicant: SPP PROCESS TECHNOLOGY SYSTEMS UK LIMITED
    Inventors: Mark Ian Carruthers, Stephen Burgess, Anthony Wilby, Amit Rastogi, Paul Rich, Nicholas Rimmer